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LithoWorks PEB. PEB Plate repeatability. Dataset: 3 data sets, each one 2 days apart from previous Metrology: On-Wafer analysis . TEA Systems Corp. 65 Schlossburg St. Alburtis, PA 18011 610 682 4146 [email protected] August 27,2003. Project Summary. Program : LithoWorks PEB

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peb plate repeatability
LithoWorks PEB

PEB Plate repeatability

Dataset: 3 data sets, each one 2 days apart from previous

Metrology: On-Wafer analysis

TEA Systems Corp.

65 Schlossburg St.

Alburtis, PA 18011

610 682 4146

[email protected]

August 27,2003

project summary
Project Summary
  • Program: LithoWorks PEB
  • Situation:
    • Three data sets have been presented from PEB Bake 8:
      • July 16,18 & 21 of 2003
  • Objective of this analysis:
    • Determine PEB stability
    • Note: Activation temperatures are set at 100 oC

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july 16 peb 8
July 16 PEB 8
  • Thermal variation from wafer mean vs time

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july 16 total thermal energy
July 16: Total THERMAL Energy

Integrated area under the time-temp curve

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july 16 energy variation
July 16; Energy Variation

Integrated area under the time-temp curve showing temperature delta from wafer average

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july 16 range rise times
July 16; Range & rise times

Plot of range of temperature about the mean temperature AND mean temperature

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july 16 thermal maps
July 16: Thermal Maps

Temperature before heating (left) and at end of maximum temperature period (right)

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july 18 peb 8
July 18; PEB 8

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july 18 energy total
July 18; Energy Total

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july 21 peb 8
July 21; PEB 8

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july 21 thermal heating
July 21; Thermal Heating

Click on image to play movie of thermal heating.

Press esc to exit.

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comparison of rise fall cycles
Comparison of Rise/Fall Cycles

Recall that the July 16 cycle had a slightly larger range/rise in temperature at 127 seconds.

Notice that none of the 3 ranges achieved steady state during at the high temperature cycle. Range across the wafer was still at about 1 oC when cooling started.

Start of cooling

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