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Single Arm Atmospheric Wafer Handling Robot

Kensington Laboratories 300mm single-arm atmospheric wafer handling robot, part of the MultiLinku2122 robot family, is designed to meet the industryu2019s most rigorous 300mm performance standards.

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Single Arm Atmospheric Wafer Handling Robot

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  1. Single Arm Atmospheric Wafer Handling Robot Advanced System Technology

  2. Kensington Atmospheric MultiLink SCARA Wafer Handling Robots have addressed the needs for semiconductor wafer and quartz substrate handling for more than a quarter century. Key innovative features developed for semiconductor robot wafer handling Through Beam Wafer Sensing, 300mm Edge-Grip End-Effector Robot Self-Teach Functionality. MultiLink SCARA wafer robots are used across the semiconductor equipment spectrum Metrology Systems, Deposition Systems, Etch Systems, Reticle Process Systems; Thermal Processing Systems.

  3. Key Features • Patented edge grip technology • Patented Automated Self Teach • Through-beam wafer mapping • Advanced wafer cassette error detection • Direct drive technology • Continuous rotation • State-of-the-art motion control • Off center pick and place • Machine tool quality construction • High resolution optical encoders on all axes • Reduced wear Z axis counter balance

  4. Key Patents • Robot Arm with Specimen Edge Gripping End Effector, 6256555 • Robot Arm with Specimen Sensing and Edge Gripping End Effector, 6275748 • Self-Teaching Robot Arm Position Method, 6360144 • Self-Teaching Robot Arm Position Method to Compensate for Support Structure Component Alignment Offset, 6366830.

  5. Options • 4th axis: supinator wafer flipper • Vacuum end effectors (200mm and 300mm) • Reflective mappers • E-diagnostics with GUI

  6. CONTACT US Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 Phone: 510.324.0126 Fax: 510.324.0130 www.kensingtonlabs.com Our Toll Free Number 1-888-977-7800 Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com Service - Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com

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