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Kensington Labs 300mm single-arm atmospheric wafer handling robot, part of the Multilink robot family, is designed to meet the industryu2019s most rigorous 300mm performance standards. The Multilink Single Arm robot incorporates a host of unique, proprietary design features which combine to provide unsurpassed reliability, superior performance, and high throughput.
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DS-02032 MultiLink Robot.qxd 9/8/06 11:56 AM Page 1 MultiLink™Robot 300mm Single Arm Atmospheric Wafer Handling Robot Kensington Laboratories’ 300mm single arm atmospheric wafer handling robot, part of the MultiLink™ robot family, is designed to meet the industry’s most rigorous 300mm performance standards. The MultiLink Single Arm robot incorporates a host of unique, proprietary design features which combine to provide unsurpassed reliability, superior performance, and high throughput. Kensington Laboratories, a leader in advanced robotics technology, is committed to developing and manufacturing the highest quality and most cost effective atmospheric robots in the industry – all backed by Kensington Laboratories’ global service and support network. • Automated Self Teach™: The patented Automated Self Teach feature reduces time required to bring systems online and provides faster time to production ramp. • High Throughput: Continuous rotation (i.e. no dead-zones) translates to short, discrete theta moves less than 180 degrees, which significantly increases throughput. • Accurate Wafer Placement: High performance design provides precise motion control and eliminates structural deflection and creep. All robot axes are guided by preloaded bearings mounted on monolithic frames machined from single ingots of highly stable aircraft-quality aluminum. • Cleanliness: Patented edge grip technology provides better than ISO Class 1 particle performance. In addition, the side-mounted MultiLink robot, combined with Kensington Laboratories’ side-mounted MultiLink robot track, maximizes the exhaust opening of the equipment front end module allowing uniform air flow from the fan filter unit through the perforated fab floor. • High Reliability: The MultiLink robot achieves industry-leading MCBF by employing direct-drive DC servo motors with real time force feedback and non-contacting glass scale encoders that monitor actual drive train output. • Precise Wafer Mapping: High performance through-beam wafer mapping allows fast, accurate wafer detection. • Zero Preventative Maintenance: Superior precision design requires no periodic lubrication or adjustments under standard operating conditions.
DS-02032 MultiLink Robot.qxd 9/8/06 11:56 AM Page 2 MultiLinkTMRobot 300mm Single Arm Atmospheric Wafer Handling Robot Specifications Repeatability Radial axis Theta axis Z axis Maximum Velocity Radial axis Theta axis Z axis Maximum Acceleration Radial axis Theta axis Z axis Range of Motion Radial axis ±0.001" (±0.025 mm) ±0.01 degrees ±0.001" (±0.025 mm) 34 inches/sec (0.86 m/sec) 1000 degrees/sec 24 inches/sec (0.46 m/sec) Key Features • Patented edge grip technology 400 inches/sec2(10.16 m/sec2) 5000 degrees/sec2 80 inches/sec2(2.03 m/sec2) • Patented Automated Self Teach • Through-beam wafer mapping • Advanced wafer cassette error detection • Direct drive technology Two links at 7.00" (177.80 mm), or three links at 5.25"-10.5"-5.25" (133.35 mm x 266.70 mm x 133.35 mm) Continuous 14.25", 17.25", 20.25" (361.95 mm, 438.15 mm, 514.35 mm) • Continuous rotation Theta axis Z axis Reliability MCBF Configurability Single arm (3 axis) Single arm (4 axis) Arms (lengths) • State-of-the-art motion control • Off center pick and place 10 million cycles • Machine tool quality construction • High resolution optical encoders on all axes Standard Supinator wafer flipper available Two links at 7.00", or three links at 5.25"-10.5"-5.25" (133.35 mm x 266.70 mm x 133.35 mm) • Reduced wear Z axis counter balance Key Patents Compliance S2 General Specifications Maximum Z axis load Z drop (distance and time) Cleanliness Weight Vacuum required Power required Mapper Communications Mounting Specifications Overall dimensions • Robot Arm with Specimen Edge Gripping End Effector, 6256555 S2-93A • Robot Arm with Specimen Sensing and Edge Gripping End Effector, 6275748 8 lbs (3.63 kg) With vacuum <1 mil; without vacuum <7 mils ISO Class 1 Robot: 85 lbs (38.64 kg); Controller: 19 lbs (8.64 kg) 10 l/min at 635 mm Hg (25 SCFH at 25" Hg) 100-220 VAC 47-63 Hz (600W PS) Through-beam standard; reflective optional RS232, IEEE-488, or Device Net™ • Self-Teaching Robot Arm Position Method, 6360144 • Self-Teaching Robot Arm Position Method to Compensate for Support Structure Component Alignment Offset, 6366830 Options Robot can diameter: 9.72" (246.89 mm); robot hole diameter: 10.00" (254 mm) Side or top mount Top mount: 3 x 1/4-20 x 0.50" DP equally spaced on a 10.375" (263.53 mm) bolt circle Wafer radius + end effector length + 1.175" (29.86 mm) 6 x #2-56 on a 1.625" (41.28 mm) bolt circle • 4th axis: supinator wafer flipper Robot mounting type Bolt pattern • Vacuum end effectors (200mm and 300mm) • Reflective mappers • E-diagnostics with GUI Minimum swept radius End effector Specifications are subject to change without notice. MultiLink Single Arm with supinator wafer flipper Through-beam wafer mapping 510-620-0235 ext 718 or visit www.kensingtonlabs.com FM27207 © 2006 Kensington Laboratories, LLC. All rights reserved. Automatic Door Opener is a trademark of Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories. All other trademarks are property of their respective owners. DS-02032
