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나노 기술. 기능성 산화물 박막 기술 Scanning Probe Microscope. 2002년 5월 23일 송태권. 참고 자료. 나노연구소 http://designwith.net/nano/?t=home Handbook of Nanostructured Materials and Nanotechnology. Nano?. Macro vs . Micro. Nano vs . Micro. Two ways in Nanotech. New function in nano-scale Not just size

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slide1

나노 기술

기능성 산화물 박막 기술

Scanning Probe Microscope

2002년 5월 23일 송태권

slide2
참고 자료
  • 나노연구소 http://designwith.net/nano/?t=home
  • Handbook of Nanostructured Materials and Nanotechnology
slide3
Nano?

Macro vs. Micro

two ways in nanotech
Two ways in Nanotech.
  • New function in nano-scale

Not just size

  • Bottom-up
    • Nanotube, Semiconductor Quantum Dots
  • Top-down
    • Nanoparticles, Nano-sized powders
perovskites
Perovskites

Ferroelectric

Optical

Magnetic

Conductive

High TC Superconductive

Transition Metal Oxides

; Multi-valence

ferroelectric
Ferroelectric
  • Ti, Zr, Nb, Ta Oxides
  • BaTiO3, Pb(Zr,Ti)O3, Bi4Ti3O12,

La-Bi4Ti3O12, SrBi2Ta2O9

  • DRAM
  • FRAM(Ferroelectric RAM)
  • IR detector
dram application
DRAM Application
  • High Density → Small Area → Complex Structure → High e
optical
Optical
  • Nb, Ta Oxides
  • LiNbO3, LiTaO3
  • SAW (Surface Acoustic Wave)
  • Non-linear Optics
  • Optoelectronics
magnetic
Magnetic
  • Mn, Co, Fe Oxides
  • (La,Sr)MnO3
  • Magnetic Head (CMR)
  • Magnetic Memory (MRAM)
  • Spintronics
conductive
Conductive
  • Cu, Co, Ti Oxides
  • (La,Sr)CoO3
  • Interconnect
htsc high t c superconductive
HTSC(High TC Superconductive)
  • Cu Oxides
  • YBa2Cu3O7-d
  • Joshephson Junction
  • SQUID
  • Bolometer
detailed topics
Detailed Topics

Oxygen Vacancy

Reduction

Multifunctional

Devices

Oxygen Vacancy

Reduction

Multilayer

Films

Oxide

Superlattices

High Density

Devices

Nano-Technology

Strain Control

schematic of a fioh
Schematic of a FIOH

Transparent Electrode (ITO)

Pyroelectric (BSN, PLZT)

Ferroelectric (BT, PZT)

CMR Material (LSMO, LCMO)

Oxide Substrate

Photon; hn

Monolithic Oxide Integrated Circuit

Light

hn

Pyroelectric

DP (DT)

Ferroelectric

DP (DT)

CMR Material

DR

Data

Storage

Retrieving

Data

Signal Sensing

& Transformation

gmr vs cmr
GMR vs. CMR
  • Giant Magneto-Resistance
    • in Magnetic Metal Multilayers(Superlattices)
  • Colossal Magneto-Resistance
    • in Magnetic Oxides
thin film deposition
Thin Film Deposition
  • PVD (Physical Vapor Deposition)
    • PLD (Pulsed Laser Deposition)
    • Sputtering
  • CVD (Chemical Vapor Deposition)
    • MOCVD
    • Sol-gel
scanning probe microscope
Scanning Probe Microscope
  • STM (Scanning Tunneling Microscope)
afm atomic force microscope
AFM (Atomic Force Microscope)
  • Non-conductive Materials like Dielectrics
  • In Air →

Easy to Use

scm capacitance
SCM (~ Capacitance ~)
  • Resonance

Frequency

applications of scm i
Applications of SCM - I
  • Semiconductor MOSFET
applications of scm ii
Applications of SCM - II
  • Memory Application