Sputtering. The removal of surface atoms due to energetic particle bombardment. Sputtering. Sputtering. First observations of cathode erosion in gas discharges W.R. Grove 1853. Sputtering. Removal of surface material as a result of energetic particle bombardment.
The removal of surface atoms due to energetic particle bombardment
of cathode erosion in
W.R. Grove 1853
Removal of surface material as a result of energetic particle bombardment.
DC- and RF sputter deposition is a convenient and inexpensive coating
Magnetron sputter deposition is very widely used and allows low pressure
discharge, high coating quality and fast deposition
Elemental mapping by static SIMS
J.P. Coad et al.
J. Nucl. Mater
Yield energy dependence.
Ejection angle distribution,
B. Emmoth, H. Bergsåker et al 1989, 1990
Velocity distribution of sputtered atoms, measured by laser induced fluoresence.
W. Husinsky et al. 1986
Energy distribution of sputtered
Tungsten atoms and tungsten
G. Staudenmaier 1984
Single crystal effects in sputtering, G. K. Wehner, Phys. Rev. 102(1956)690-704
Non linear sputtering yield,
evidence of spikes . H.H. Andersen and H. Bay 1974
Single knock-on regime
Linear cascade regime
The linear cascade regime theory got its semi-final form from
P. Sigmund, 1969
TRIM , J.P. Biersack and W. Eckstein 1984 MARLOWE
Molecular dynamics, C. Erginsoy et al 1964
Impurity fluxes in TEXTOR
I. Gudowska, H. Bergsåker et al.
J. Nucl. Mater. 176-177(1990)363