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F.L. Lewis, Assoc. Director for Research Moncrief-O’Donnell Endowed Chair Head, Controls, Sensors, MEMS Group Automation & Robotics Research Institute (ARRI) The University of Texas at Arlington Bruno Borovic MEMS Modeling and Control With Ai Qun Liu, NTU Singapore Thermal Model
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Moncrief-O’Donnell Endowed Chair
Head, Controls, Sensors, MEMS Group
Automation & Robotics Research Institute (ARRI)The University of Texas at Arlington
MEMS Modeling and Control
With Ai Qun Liu, NTU Singapore
Vibration-driven E-Mag generator
Fab Layout of Coils with
Folded Beam Suspension
Load-deflection relation for square membrane
Maximum membrane slope occurs at
(x,y)= (a,a/2),(a,3a/2), (a/2,a), (3a/2,a).
maximum slope is
Optical Pressure Sensor
FEA of membrane deflection
Fiber intensity loss vs. beam offset
with Wendell McCulley- InterMEMS, Inc.
MEMS process Fab layout
Array of membranes with
MicroFAB, Inc. -
Optical Flow Sensor
For a wide range of Reynolds numbers, CD= 1.28
Drag torque about the hinged bottom
Where a Cermak flow velocity profile is assumed
Steady-state tilt angle is
Surface Micromachined Design
No moving parts!
Number of transistors on a chip is now limited by heat dissipation.
Fabricate micro-channels on the back of the chip for cooling.
With Dereje Agonafer, Director
UTA Packaging Center
Intellisuite simulation showing dry (RIE) etching of 110 Si to get Micro Channels. Channels are more than 100 microns high (ARRI).
1. BCW Detectors
Molecular Recognition and Supramolecular Chemistry - D. Rudkevich
In miniaturized supramolecular devices – sensors, surfaces, and membranes - communication between the analyte-guests and their receptors on a molecular level is transformed to measurable macroscopic effects
calixarenes as unique, specific NO2-sensing species
these interactions are reversible, unique, and specific
Proteins (enzymes and antibodies) and aptamers as BCW sensors – R. Gracy, UNT Health Science Center
Functional protein microarrays bind specific capture molecules to solid matrix materials
Immunoassay for oxidized Fibrinogen isoforms as biomarkers for Alzheimer’s disease
Oligonucleotide aptamers bind selected molecules
Anti-ricin Aptamer as potential Biosensor for ricin
2. Thin Films for BCW Detector Support
Structured chemically-activenanosphere thin films- K. Rajeshwar
Deposit chemically active agent and dissolve nanospheres
Electrostatically self-assembled polystyrene
To improve sensitivity to challenge agents down to ppb, it is necessary to improve charge separation to prevent recombination of electron/hole photogenerated charges.
Site-proximity mechanism in a Ni/TiO2 composite film illustrating the complementary roles of the Ni and TiO2 components.
Interdigitated Finger Gate Electrode FET
Uses induced resistivity changes
3x3 IGEFET sensor micro-array – E. Kolesar
Microcantilever MEMS sensor array- Kolesar
DSP and C&C User Interface for wireless networks- Lewis
Uses induced mass changes
Neural network classification for unique signatures
Automatic Probe MP-285
* Already in use
**Ideally, PXI system + SCXI signal conditioning
With 3D info
Based or pre-programmed behaviours
with Wendell McCulley
Packaging for MEMS Pressure Sensor- W. McCulley