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F.L. Lewis, Assoc. Director for Research Moncrief-O’Donnell Endowed Chair Head, Controls, Sensors, MEMS Group PowerPoint Presentation
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F.L. Lewis, Assoc. Director for Research Moncrief-O’Donnell Endowed Chair Head, Controls, Sensors, MEMS Group Automation & Robotics Research Institute (ARRI) The University of Texas at Arlington Bruno Borovic MEMS Modeling and Control With Ai Qun Liu, NTU Singapore Thermal Model

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slide1

F.L. Lewis, Assoc. Director for Research

Moncrief-O’Donnell Endowed Chair

Head, Controls, Sensors, MEMS Group

Automation & Robotics Research Institute (ARRI)The University of Texas at Arlington

slide2

Bruno Borovic

MEMS Modeling and Control

With Ai Qun Liu, NTU Singapore

Thermal Model

Mechanical Model

Electrical Model

Optical Model

FEA

Experiment

slide3

MEMS Power Generation

Vibration-driven E-Mag generator

Fab Layout of Coils with

Folded Beam Suspension

slide4

Pressure Sensors for Pulmonary Ventilator Control

Load-deflection relation for square membrane

Maximum membrane slope occurs at

(x,y)= (a,a/2),(a,3a/2), (a/2,a), (3a/2,a).

maximum slope is

Optical Pressure Sensor

FEA of membrane deflection

Fiber intensity loss vs. beam offset

with Wendell McCulley- InterMEMS, Inc.

MEMS process Fab layout

slide5

Testing and Calibration of Optical Pressure Sensors

Array of membranes with

different dimensions

MicroFAB, Inc. -

fiberoptics

Optical micro-lenses

David Wallace

Optical Pressure

Sensor Calibration

Facility

slide6

Flow Sensors for Pulmonary Ventilator Control

Self-Assembly Sequence

Drag Force

FEA

Optical Flow Sensor

For a wide range of Reynolds numbers, CD= 1.28

Reynolds Number

Drag torque about the hinged bottom

Where a Cermak flow velocity profile is assumed

Steady-state tilt angle is

Surface Micromachined Design

slide8

MicroFluidics for VLSI Chip Cooling

Number of transistors on a chip is now limited by heat dissipation.

Fabricate micro-channels on the back of the chip for cooling.

With Dereje Agonafer, Director

UTA Packaging Center

Intellisuite simulation showing dry (RIE) etching of 110 Si to get Micro Channels. Channels are more than 100 microns high (ARRI).

slide9

Biochemical Monitoring

  • MEMS sensors for biochemical species including anthrax, nerve gases, NOx, organophosphorus
  • Wireless Sensor Networks for remote site biochemical monitoring

1. BCW Detectors

Molecular Recognition and Supramolecular Chemistry - D. Rudkevich

In miniaturized supramolecular devices – sensors, surfaces, and membranes - communication between the analyte-guests and their receptors on a molecular level is transformed to measurable macroscopic effects

calixarenes as unique, specific NO2-sensing species

these interactions are reversible, unique, and specific

slide10

1. BCW Detectors

Proteins (enzymes and antibodies) and aptamers as BCW sensors – R. Gracy, UNT Health Science Center

Functional protein microarrays bind specific capture molecules to solid matrix materials

Immunoassay for oxidized Fibrinogen isoforms as biomarkers for Alzheimer’s disease

Oligonucleotide aptamers bind selected molecules

Anti-ricin Aptamer as potential Biosensor for ricin

slide11

template-directed growth of thin films and composites.

2. Thin Films for BCW Detector Support

Structured chemically-activenanosphere thin films- K. Rajeshwar

Deposit chemically active agent and dissolve nanospheres

Electrostatically self-assembled polystyrene

nanospheres

To improve sensitivity to challenge agents down to ppb, it is necessary to improve charge separation to prevent recombination of electron/hole photogenerated charges.

Site-proximity mechanism in a Ni/TiO2 composite film illustrating the complementary roles of the Ni and TiO2 components.

slide12

3. MEMS Platforms for BCW Detection Agents

Interdigitated Finger Gate Electrode FET

Uses induced resistivity changes

3x3 IGEFET sensor micro-array – E. Kolesar

Microcantilever MEMS sensor array- Kolesar

DSP and C&C User Interface for wireless networks- Lewis

Uses induced mass changes

Neural network classification for unique signatures

slide14

Micro Manipulator

MP-285

Probe Controller

Manual Control

Automatic Probe MP-285

slide15

NI Hardware

* Already in use

**Ideally, PXI system + SCXI signal conditioning

  • NI 1411 IMAQ card (Image Acquisition)*
  • NI6711 PCI card (Data Aquisition)*
  • NI 485/8 Serial Port Card (serial com. with controlller)
  • SCXI – Signal conditioning (thermocouple,…etc.)
slide17

Vision Feedback

Vision

info

Stored map

Map

From

MEMS-Pro

3D info

Feature-based

Localization

With 3D info

Based or pre-programmed behaviours

slide19

MEMS Packaging

with Wendell McCulley

Dereje Agonafer

Packaging for MEMS Pressure Sensor- W. McCulley

slide20

Piet

Mondrian