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Sustainability Challenges in Semiconductor Manufacturing: Insights from Life Cycle Assessment

This paper evaluates the environmental impacts of semiconductor manufacturing through Life Cycle Assessment (LCA), revealing significant concerns about chemical, energy, and water consumption. Findings indicate that up to 610g of chemicals are used per cm² of silicon wafer, with emissions ranging from 1.2 to 160g per cm². Semiconductor manufacturing consumes vast amounts of electricity, with electricity accounting for 83% of energy use. Additionally, the industry relies heavily on high-purity water, utilizing millions of gallons daily. Strategies to mitigate these impacts are essential for sustainable development.

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Sustainability Challenges in Semiconductor Manufacturing: Insights from Life Cycle Assessment

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  1. The 1.7 Kilogram Microchip Authors: Eric D. Williams, Robert U. Ayres, and Miriam Heller Published by the American Chemical Society Presented by Drew McLean

  2. Life Cycle Assessment • LCA is a technique used to assess the environmental aspects and potential impacts associated with a product, process, or service. This is done by: • Compiling an inventory of relevant energy and material inputs and environmental releases • Evaluating the potential environmental impacts associated with identified inputs and releases • Interpreting the results to help you make a more informed decision

  3. Sustainability Issue Findings 1. Chemical Consumption • Environmental impacts on air, water, and ground systems • Nearly all chemicals used in semiconductor processing do not end up on the final product • Chemical use: 9-610g per cm2 of silicon wafer • Emissions: 1.2-160g per cm2 of silicon wafer

  4. Sustainability Issue Findings (cont’d) 2. Energy Consumption: Electricity & Fossil Fuel International Semiconductor reports that: • 50%: Cleanroom Heating, Ventilation, Air Conditioning • 30-40%: Wafer processing tools • 285kWh of electricity required to fabricate one 150mm wafer. • JEIDA report 83% of total energy consumption is electricity. The remaining 17% being a mix of heavy oil, gas and kerosene.

  5. Sustainability Issue Findings (cont’d) 3. Water Consumption • High purity water required during the semiconductor manufacturing process. • Water is purified on site to remove bacteria, organics, dissolved minerals etc. • Typical 6inch wafer processing 40,000 wafers per month consumes 2-3 millions of gallons per day

  6. Example: 32MB DRAM Microchip • Package / Die Size: 1.0cm x 2.7cm / 1.2cm2 • Weight: 2.0g Material and Energy Consumption: • Fossil Fuel Input: 1200g • Fossil Fuel Input while in use: 440g • Chemicals: 72g

  7. What are the concerns from a sustainability perspective? • There is a limited amount of publicly available literature relevant to materials analysis of the semiconductor industry • There are huge environmental impacts on the environment due to the high amounts resources being used

  8. Any Questions?

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