Design, Fabrication and Characterisation of RF-MEMS Preloader

Design, Fabrication and Characterisation of RF-MEMS - PowerPoint PPT Presentation


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Summary. Introduzione alle strutture MEMSTecniche di fabbricazionePackaging issuesIntegrazione MEMS-CMOSCaratterizzazione micromeccanicaApplicazioni MEMS per sistemi wirelessEsempi di componenti in tecnologia MEMSImpatto a livello architetturaleSimulazione circuitale comportamentale di MEMS

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Design, Fabrication and Characterisation of RF-MEMS


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