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Piezoresistive Cantilever Array Sensors ~ Where Nano & Bio Meet ~

Piezoresistive Cantilever Array Sensors ~ Where Nano & Bio Meet ~. Genki Yoshikawa , Hans-Peter Lang, Toshio Sakurai, Terunobu Akiyama, Laure Aeschimann, Urs Staufer, Peter Vettiger, and Christoph Gerber NCCR, University of Basel, Switzerland MANA, NIMS, Japan

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Piezoresistive Cantilever Array Sensors ~ Where Nano & Bio Meet ~

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  1. Piezoresistive Cantilever Array Sensors~ Where Nano & Bio Meet ~ Genki Yoshikawa, Hans-Peter Lang, Toshio Sakurai, Terunobu Akiyama, Laure Aeschimann, Urs Staufer, Peter Vettiger, and Christoph Gerber NCCR, University of Basel, Switzerland MANA, NIMS, Japan IMT, University of Neuchâtel, Switzerland IMR, Tohoku University, Japan

  2. For Imaging... Binnig, G., Quate, C. F., & Gerber, Ch. Phys. Rev. Lett. 56, 930-933 (1986) 10 µm Beyond Imaging – To Sensing

  3. Cantilever array sensor

  4. Amplifier VCSEL Syringe y1 y2 pump PSD Valve select Peltier Liquid cell element L i q Cantilever u i d array s a m p in out l e s Nanomechanics: Exploring New Frontiers in Biosensing and Diagnostics M. Ghatkesar, N. Backmann, F. Huber, T. Braun, N. Nugaeva, M. Vögtli, J.-P. Rameeyer, W. Grange, M. Karle, H.P. Lang, M. Hegner, Ch. Gerber label-free and amplification-free measurement of different bio- molecular interactions in parallel NCCR, University of Basel Cantilever Array Sensor Group, NCCR Nanoscale Science, Basel

  5. Expensive Complex Bulky periphery Amplifier VCSEL Syringe y1 y2 pump PSD Valve select Peltier Liquid cell element L i q Cantilever u i d array s a m p in out l e s Impossible in opaque liquid → Solution: Piezoresistive cantilever array

  6. Out In Piezoresistive cantilever array sensors Advantage: ・Low cost ・Simple (small, easy) 　→ Easy to miniaturize ・No laser alignment ・Possible in opaque liquid Measurement Cantilever Reference Cantilever can be integrated into a match-box sized device!!

  7. High Performance of Piezoresistive cantilever array sensors Discrimination of a single CH2 group!! 100 ppm 30 ppm 10 ppm Sub-ppm sensitivity!! It will open the door to a new era of 　・Medical diagnostics 　・Genetic research 　・Environmental research

  8. PCA of Various Vapors Each vapor can be clearly distinguished from others

  9. PCA of Alkane Vapors Clearly discriminated from Pentane (C5) to Dodecane (C11)

  10. Microfabricated Cantilever-Array Cantilever length : 500µm width : 100µm thickness : 0.5µm (7µm) Pitch : 250µm Spring constant: 0.02 N/m (20N/m) Resonance freq: 4 kHz (40kHz)

  11. Out In 100円 (Japan) 1 Euro (Europe) 1 Franc (Switzerland) Piezoresistive cantilever array sensor chamber

  12. Piezoresistive Cantilever-Array Measurement Cantilever Reference Cantilever Ink-jet polymer coating

  13. Detect its resistivity change by a Wheatstone-bridge Measurement Cantilever Reference Cantilever Principle of Piezoresistive cantilever Deflection of cantilever causes the stress to a piezoresistor

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