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An Integrated MEMS-BiCMOS SINCGARS Transceiver. Demonstration Schedule Monday, June 5th 12-1PM and 5-6PM Tuesday, June 6th 3-4PM Wednesday, June 7th 5-6PM. Design Automation Conference, June 2000. Michael McCorquodale, Ark Wong, Karthik Nagarajan, Haluk Kulah, Clark T.-C. Nguyen

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an integrated mems bicmos sincgars transceiver

An Integrated MEMS-BiCMOS SINCGARS Transceiver

Demonstration Schedule

Monday, June 5th 12-1PM and 5-6PM

Tuesday, June 6th 3-4PM

Wednesday, June 7th 5-6PM

Design Automation Conference, June 2000

Michael McCorquodale, Ark Wong, Karthik Nagarajan, Haluk Kulah, Clark T.-C. Nguyen

Center for Integrated Microsystems

Department of Electrical Engineering and Computer Science

University of Michigan

Ann Arbor, Michigan 48109- 2122

rf channel selection with mems

MEMS Filter

Antenna

Signal

Power

MEMS Filter

MEMS Filter

MEMS Filter

MEMS Filter

MEMS Filter

MEMS Filter

MEMS Filter

MEMS Filter

MEMS Filter

MEMS Filter

MEMS Filter

MEMS Filter

MEMS Filter

MEMS Filter

MEMS Filter

w

RF Channel Selection with MEMS

Desired

Information

Signal

Antenna

Signal

Power

w

Front-End filters significantly reduce interfering signals prior

to subsequent electronics

Channel selection achieved by simply activating the correct filter

vertically driven clamped clamped m resonator
Vertically-Driven Clamped-Clamped mResonator

To date, most used design to achieve VHF

Smaller mass  higher frequency range

free free beam m mechanical resonators
Free-Free Beam mMechanical Resonators

Effectively removes anchor dissipation by removing the anchors themselves

fabricated polysilicon free free beam m resonator
Fabricated PolysiliconFree-Free Beam mResonator

Beam Length = 14.3mm

Support Length = 13.3mm

fo = 71.5MHz

Q = 8,250

Quarter-Wavelength

Torsional Beam

Drive

Electrode

1 m

13.3 m

14.3 m

Flexural-Mode

Beam

Ground Plane and

Sense Electrode

Anchor

Anchor

conclusions
Conclusions
  • Demonstrated advantages of RF channel selection
  • Compared proposed architecture to typical architecture
  • Demonstrated clamped-clamped and free-free beam resonators
  • Reported typical performance parameters for free-free devices