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Lithography is the process of using light to transfer a pattern onto a substrate. It is the critical step in semiconductor manufacturing and MEMS fabrication.
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Micro-Electro-Mechanical Systems Lithography is the process of using light to transfer a pattern onto a substrate. It is the critical step in semiconductor manufacturing and MEMS fabrication. The most common lithography used in these applications is photolithography, which uses light to expose a photosensitive material on the substrate.
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