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真空晨会报告

真空晨会报告. 2009-06-13. 目前真空系统状态. 内真空: 2 台主分子泵 +3CP ; 外真空: 2 台分子泵; 低杂波: 1 套分子泵机组; 目前烘烤: 感应烘烤: 0 内衬烘烤: 20 A 管道烘烤: 100 V. 主要工作. He GDC 05:20 - 07:00 0.6 Pa , 2 A. 装置各处真空度演变. 内真空 质谱.

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真空晨会报告

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  1. 真空晨会报告 2009-06-13

  2. 目前真空系统状态 • 内真空:2台主分子泵+3CP; • 外真空:2台分子泵; • 低杂波:1套分子泵机组; • 目前烘烤: • 感应烘烤:0 • 内衬烘烤:20 A • 管道烘烤:100 V

  3. 主要工作 • He GDC • 05:20 - 07:00 • 0.6 Pa,2 A

  4. 装置各处真空度演变

  5. 内真空 质谱

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