1 / 5

真空晨会报告

真空晨会报告. 2009-06-26. 主要工作. He GDC 04:00-05:30 2 A ， 0.5 Pa. 目前真空系统状态. 内真空： 2 台主分子泵 +3CP ； 外真空： 2 台分子泵； 低杂波： 1 套分子泵机组； 目前烘烤： 感应烘烤： 0 内衬烘烤： 10 A 管道烘烤： 100 V. 装置各处真空度演变. 内真空 质谱.

corin
Download Presentation

真空晨会报告

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. 真空晨会报告 2009-06-26

  2. 主要工作 • He GDC • 04:00-05:30 • 2 A，0.5 Pa

  3. 目前真空系统状态 • 内真空：2台主分子泵+3CP； • 外真空：2台分子泵； • 低杂波：1套分子泵机组； • 目前烘烤： • 感应烘烤：0 • 内衬烘烤：10 A • 管道烘烤：100 V

  4. 装置各处真空度演变

  5. 内真空 质谱

More Related