1 / 4

黃光微影室

國立嘉義大學 應用物理學系、光電暨固態電子研究所. 黃光微影室. 可進行微米加工 ， 製作微米級半導體 / 金屬結構. 電子束微影機 (NPGS) 實體照片. 電子束微影機 (NPGS) 規格資料. Hitachi S-3000H : magnifications to 300,000x, 3.5 nm image resolution, with Nanometer Pattern Generation System (NPGS).

chet
Download Presentation

黃光微影室

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. 國立嘉義大學 應用物理學系、光電暨固態電子研究所 黃光微影室 • 可進行微米加工，製作微米級半導體/金屬結構

  2. 電子束微影機(NPGS)實體照片

  3. 電子束微影機(NPGS)規格資料 Hitachi S-3000H : magnifications to 300,000x, 3.5 nm image resolution, with Nanometer Pattern Generation System (NPGS). http://www.hitachi-hitec.com/em/sem/s3000nh.htmlhttp://www.hitachi-hitec.com/global/em/sem/sem_index.htmlNPGS: http://www.jcnabity.com/

  4. 電子束微影機(NPGS) • 可進行奈米微細加工，製作奈米級半導體/金屬結構

More Related