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Karlsruhe Institute of Technology Susan Anso n

Facilitating access to high end MNT Micro and NanoManufacture Networking Workshop Industrial Technologies 19 June 2012. Karlsruhe Institute of Technology Susan Anso n. Discussion questions. Are MNT‘s still relevant?

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Karlsruhe Institute of Technology Susan Anso n

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  1. Facilitating access to high end MNT Micro and NanoManufacture Networking WorkshopIndustrial Technologies19 June 2012 Karlsruhe Institute of Technology Susan Anson

  2. Discussionquestions • Are MNT‘s still relevant? • Howcanemergingtechnologiesbebrought out ofthe Lab andintoapplication? • Howcanthesetechnologiesbeencouragedto „emerge“ anddevelop so thattheyare relevant totheneedsofEurope‘s end users?

  3. Fact sheet of EUMINAfab • 12 partnersfrom 8 different countries • EC funded;Grant Agreement no.: FP7-226460 • March 2009 – February 2013 • Total budget: 7.8 M€ • Multimaterial microandnanofabricationandcharacterisation • Integrates a Capital investment > 200 M€ • > 70 technologicalexperts • By June 2012 80 users, • 1200 unitsofacess- valueover 1,200,000€ • Access isfreeofcostforpublicresearch • Call 6 closes 30th June- • limited fundsare still available

  4. Atthestart a MNT toolbox • µ and nanostructuring • Electron beam • E-beam & SCIL • Ion beam (Focus-sed cross beam) • DPN • Direct X-ray litho • Laser technologies (e.g. ps, fs, surface texturation) • Mechanical µma-chining (freeform) • Photopolymeristn. • Mastermaking process chain • DRIE (Si, glass, SiO2) • Thin film deposition • PVD technologies (e.g. noble metals, DLC, nanocomposi-tes, metals, nitrides) • Sole Gel: spin and dip coating • Org. PVD (e.g. organic liquids & powders,oxides) • CVD (metals, polymers, ceramics) • Self Assembly (e.g. semiconductors, organic) • Screen printing (e.g. metals, dielectrics) • Optical Coating • Replication • µ injection moulding (e.g. polymers, metals, ceramics; small series) • µ hot embossing (small series) • Thermal imprinting & UV-NIL • NIL process chain (UV photolitho, dry & wet etching) • Characterisation • HRTEM • XPEEM • X-ray tomography • Auger Nanoprobe • In situ synchrotron X-ray diffracto-metry (> 2010) • AFM, conductive AFM • Spectrophotometry /-radiometry • Profilometry (e.g. low force contact mode & white light mode) • µCMM • Low force balance, ellipsometry Comewithyourrequestandusethetechnologyavailable- expected time of User project 2-3 days

  5. Technology solutionprovider MNT fast developing newsince 2012 – Laser Lithography, improvedphotonicsand clean roomfacilitieshavebeenaddedtotheportfoliobythepartners Mini-collaborativeprojects

  6. EUMINAfab- Benefitting Users

  7. Micro-nanotechnologyplatform – toapplication • User projectsareapplicationfocussed

  8. Summary ofachievementsfrom EUMINAfab • Created a commonidentity • „Onefor all and all foroneapproach“ amongpartners • Opened transnational access so astoenable a „real world“ testbedforemergingtechnolgies • Establishednicheoffunctionalsolutionproviderspecializing in the design and creation of nano and micro structured components • Cross fertilisationofideas • avoids divergent evolutionoftechnologiesatlocalsites • Common platformformarketingandtheexchangeofknowledge • Enables in-roadsintonewusercommunities • Broaderbaseofcontactsforreachingusers • Increasedmobilityofresearchersacross Europe • Developed an applicationapproachforfunctionalsolutionsusing MNT • a stepfurtherthanthetechnologytool box planned in the GA

  9. EUMINAfab – Proposedcontinueddevelopment Hub forknowledgebased MNT functionalsolutionprovision Provide essential links in theinnovationvaluechain

  10. Thankyouforyourattention • Discussioniswelcome • Documentavaialblefordownloadwww.euminafab.eu • susan.anson@kit.edu • +49 721 608 28103

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