EEE529 MICROSYSTEM SUSPENDED MICROCHANNEL RESONATOR. Presentation by Bello Hamza Abdullahi. Table of contents. Introduction. Suspended microchannel Resonator(SMR). Beam Model. SMR With Integrated Piezoresistive Readout. Fabrication Of SMR. Performance Factors. Advantages.
where v(x, t) is the deflection of the beam. U is the average flow velocity. L,B and H is the length, width, and height of the beam, respectively.
Then Eq. (2) can be rewritten as
The solution of the above equation can be represented by
R. Chunara1, T.P. Burg2, K. Payer3, P. Dextras2, S.R. Manalis2
1Harvard-MIT Division of Health Sciences and Technology, USA
2Department of Biological Engineering, MIT, USA
3Microsystems Technology Laboratories, MIT, USA