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Micro-mirror. Micromechatronics System FH AACHEN UNIVERSITY OF APPLIED SCIENCES. Supervisor: Prof. Kämper Team member: Chun Wa George Young Issis Contreras Ramanathan Swaminathan Spandan Shroff. 14 -11-2011. Project Goal. Design of an electrically controllable micromirror

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micro mirror

Micro-mirror

Micromechatronics System

FH AACHEN

UNIVERSITY OF APPLIED SCIENCES

Supervisor: Prof. Kämper

Team member:

Chun Wa George Young

Issis Contreras

RamanathanSwaminathan

SpandanShroff

14-11-2011

project goal
Project Goal

Design of an electrically controllable micromirror

Implement the design to specific application

Rotational motion

Linear motion (Optional)

Micro scanning mirror Rotational+ Translational

Micro scanning mirror

Source: FhG-IPSM

tasks
Tasks

Study on

Application of Micromirror

Type of Micromirror

Working principle of Micromirror

Spectrometer

Working principle

Advantage of disadvantage compared to conventional solution

Design on

Spectrometer system

Micromirror specification

Micromirror system

Sensors andActuators

application
Application

Advantage of micromirror implementation over conventional solutions

  • Small size
  • Low cost,
  • Fast response – filter unwanted wavelengths
  • High signal to noise ratio
  • Reduced complexity and low power consumption

Source: FhG-IPSM

application1
application

Confocal microscopy

Application

3D biological imaging

Advantages :

Applicable to surface profilometry

Scanning unit (Micromirror)

moves the focused laser beam across

specimen line by line

Source: Carl Zeiss, Nikon

Sensors andActuators

application2
application

3D Photonic switch

Application

Fibre optical communication

Advantages :

Low cost, more simple optical path

(more than 32x32 array)

Micromirror

Static type with high pointing precision

Source: GLIMMERGLASS

application3
application

Spectrometer

Application

IR - Organic chemistry

UV, Visible light - Concentration of solution quantitatively

Advantages :

Small size, High Speed

Micromirror

resonant type

Source: Carl Zeiss, Acal BFi Germany GmbH

working principle
Working Principle

Monochromator

In-plane diffraction grating

Micromirror

Principle

Prism

Diode Array

Source: FhG-IZM

diffraction grating
Diffraction grating

Monochromatic light

d sina + d sinb= wavelength x m

So leading to constructive interference

diffraction grating1
Diffraction grating

Grating efficiency curve

Source: Acton Research

patent study
Patent study

Triple Grating Monochromator for ~121nm to IR

Czerny-Turner mount

Turret system:

Triple Grating in triangular arrangement

Source: Acton Research