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Weekly Report. Speaker : Hong- Ru Li Advisor : Chao-Wen Liang Date︰2014/07/25. Schedule. Off-axial PSF measurement. According to the Zernike polynomial, the astigmatism is consist of these two equation. According to the Seidel polynomial, the astigmatism this equation.

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Weekly report

Weekly Report

Speaker:Hong-RuLi

Advisor:Chao-Wen Liang

Date︰2014/07/25



Off-axial PSFmeasurement

  • According to the Zernike polynomial, the astigmatism is consist of these two equation

  • According to the Seidel polynomial, the astigmatism this equation

  • Therefore the relationship of the magnitude and direction of Astigmatism and the Z4、Z5


Off axial psf measurement
Off-axial PSFmeasurement

  • From ZYGO interferometer

  • From PSF experiment


Off-axial PSFmeasurement

The magnitude of Astigmatism with the Rotational angle

The direction of Astigmatism with the Rotational angle

ZYGO :RMS=0.037563

PSF :RMS=0.043953


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