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Piezoelectric Displacement Results of Measuring Pt/PNZT/Pt Capacitor on Seiko Instruments SPA400 AFM. PowerPoint Presentation
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Piezoelectric Displacement Results of Measuring Pt/PNZT/Pt Capacitor on Seiko Instruments SPA400 AFM. - PowerPoint PPT Presentation

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Piezoelectric Displacement Results of Measuring Pt/PNZT/Pt Capacitor on Seiko Instruments SPA400 AFM. . Radiant Technologies, Inc. August 7, 2001. Sample Description. Capacitor Area: 12µ x 12µ Construction: Pt/PNZT/Pt Composition: 4/20/80 PNbZT PNZT Thickness: 1 µm. Displacement at 40V.

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slide1

Piezoelectric Displacement Results of Measuring Pt/PNZT/Pt Capacitor on Seiko Instruments SPA400 AFM.

Radiant Technologies, Inc.

August 7, 2001

sample description
Sample Description
  • Capacitor Area: 12µ x 12µ
  • Construction: Pt/PNZT/Pt
  • Composition: 4/20/80 PNbZT
  • PNZT Thickness: 1µm
displacement at 40v
Displacement at 40V

Displacement measured at 40Vwith a measurement period of 1 second.

displacement at 40v4
Displacement at 40V

Displacement loop averaged 10 times.

nested displacement loops
Nested Displacement Loops

Displacement measured at 40V, 30V, 20V, and 10V. Measurement period is 1 second.

conclusion
Conclusion
  • Precision Premier integrates with the Seiko Instruments AFM family to collect displacement measurements of thin ferroelectric films.
  • The 1µm thick Radiant 4/20/80 PNbZT film displaced 23Å at 40V giving the film a d33 value of 57.5.
  • The measured value is the not the true d33value of the film due to strong clamping by the substrate.
  • Piezoelectric fatigue, frequency response, and imprint can also be measured using the Vision software.