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Nanopositioning R&D Plan Yong Chu Yong Chu Experimental Facilities Division, NSLS-II Experimental Facilities Advisory Committee Meeting April 23-24, 2009 HXN Team HXN beamline Yong Chu: Group Leader (Joined Jan. 2009) Beamline Scientist: Getting near making decision to hire

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slide1

Nanopositioning R&D Plan

Yong Chu

Yong Chu

Experimental Facilities Division, NSLS-II

Experimental Facilities Advisory Committee Meeting

April 23-24, 2009

hxn team
HXN Team

HXN beamline

Yong Chu: Group Leader (Joined Jan. 2009)

Beamline Scientist: Getting near making decision to hire

Ken Evans-Lutterodt (MOU Staff, Kinoform development, lead initial HXN effort )

Nanopositioning R&D

Engineer: Interviewing

1 nm R&D

Hanfei Yan (MLL theory, optics testing)

Enju Lima (coherent phase retrieval, optics testing)

Ray Conley (MLL fabrication, metrology)

Nathalie Bouet (postdoc, MLL processing)

James Biancarosa (technician, MLL fabrication)

technical challenges
Technical Challenges
  • Focusing optics

- fabrication of large (>100 mm), wedged MLLs

- thinning MLLs for x-ray energies at 10 keV or lower

- bonding two MLLs into a monolitic optic

- wedged MLLs are extremely chromatic

  • X-ray Microscope

- sub-nanometer positioning /scanning

- sub-nanometer stability

- small working distance ( < 1 mm)

- integrated XRF detector with maximum solid angle

- implementation of in situ controls or sample environments

  • End-Station

- vibration, temperature, air-flow, acoustic management

  • Beamline optics

- large coherence length at focusing optics

- angular stability of 1 mrad or better

- preservation of uniform wave front

slide4

Schematic of the Overall Design Strategy for 1nm

In-hutch DT ~ 0.1oC

Temperature stability in mini-closure: DT < 0.05oC overall, < 0.01oC relative (bewteen optic & sample)

Hutch wall

Low-profile low thermal expansion stages with active feedback: Dz~0.2nm

1nm focus

Engineered structures to compensate for measured floor vibration

Active damping /isolation table: Dz~2-4nm

Satellite bldg. wall on separate footing

Specially engineered granite support

with no vibration amplification: Dz<20nm

Granite block

Satellite bldg. Thick concrete slab structural filtering: Dz < 20nm

Conventional natural site vibration: Dz < 25nm

considerations for nanopositioning
Considerations for Nanopositioning
  • Actuator
  • - piezoelectric with moderate travel distance
  • Guidance/Carrier
  • - avoid bearings, sliders, screws, gear-reducer, etc
  • - flexure-based motion for higher stiffness.
  • Sensors
  • - feedback on the “combined” motion
  •  Laser Doppler Linear Encoder
  • - require low noise enabling high res.
  • Control
  • - high speed/bandwidth
  • - need capability for “fly scan”
  • Environment
  • - suppression of low frequency vibration
  • - temp. stability to prevent drift

Deming Shu’s Prototype Linear Flexure

2 mm travel range + 4 mrad tilt error

Resolution test of the one-dimensional laser Doppler linear actuator closed-loop control system by Deming Shu (APS)

nanopositioning r d plan
Nanopositioning R&D Plan
  • In collaboration with the APS:
  • Develop a long travel (~3mm), high-stiffness, flexure-based xyz linear stages with laser encoding resolution of sub-nanometer.
  • Develop a long range (~10°), high-stiffness, flexure-based f-rotary stage.
  • - use high mechanical repeatability to build a look-up table to correct run-out and wobble errors.
  • Develop MLL positioner, meeting the HXN requirements (the experience from the CNM/APS MLL instrument will be very helpful).
  • Construct a HXN prototype (in air or He) combining the above components by FY2011-Q4.
  • Develop vibration damping solutions for the HXN support frame/table.
hxn microscope
HXN microscope
  • The microscope design will be guided by the experience with the HXN prototype.
  • Require differential laser encoding between the sample and the MLL optics.
  • In vacuum for thermal stability.
  • Integration of XRF detector.
  • Require 0.2~0.5 nm stability.
  • Work with a vender for construction
hxn time line
HXN Time Line

FY2013

FY2014

FY2010

FY2012

FY2011

FY2009

FY2015

Experiment at CNM/APS

Wedged MLL available

Prototype-I

Testing Prototype-I at APS or other SRs

Experiment at HXN

Build up NSLS-II Nanopositioning Lab:

Research Vibration Damping for the HXN table

Prototype-II construction

Prototype-II Design

summary
Summary
  • Nanopositioning R&D will be focused on developing high-stiffness, flexure-based xyz linear stages and a rotary stage with long travel (~3mm + ~10°) in collaboration with the APS
  • HXN prototype is planned to be constructed by FY2011-Q4.
  • HXN prototype will enable:

- testing of MLLs

- investigating methods to bond two MLLs

- identifying specific engineering/technical challenges required for

the HXN microscope