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BS EN ISO 14644-3. Cleanrooms & associated controlled environments- Part 3: Metrology and test methods . DIS. BS EN ISO 14644-3 Metrology & Test Methods. Current Status 1. DIS was issued by ISO in September 02 2. UK comments to BSI to be made by end December 02

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BS EN ISO 14644-3


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bs en iso 14644 3

BS EN ISO 14644-3

Cleanrooms & associated controlled environments-

Part 3:

Metrology and test methods

DIS

bs en iso 14644 3 metrology test methods
BS EN ISO 14644-3Metrology & Test Methods

Current Status

1. DIS was issued by ISO in September 02

2. UK comments to BSI to be made by end December 02

3. LBI/30 will consider all UK comments by end January 03

4. BSI vote to CEN/ISO by end February 03

5. DIS is valid and can be referred to and used until it is superseded.

6. Likely time when revised DIS will be available - mid 2004

bs en iso 14644 3 metrology test methods3
BS EN ISO 14644-3Metrology & Test Methods

14644-1:1999 Classification of air cleanliness

14644-2:2000 Specifications for testing and monitoring to prove continued compliance with -1

14644-3:DIS Metrology and test methods

14644-4:2001 Design, construction & start-up

14644-5:FDIS Operations

14644-6:CD Vocabulary/terminology

14644-7:FDIS Separative devices

14644-8:CD Classification of Airborne Molecular Contamination

bs en iso 14644 3 metrology test methods4
BS EN ISO 14644-3Metrology & Test Methods

Current Status of BS 5295

BS 5295 Part 0: General Introduction - Current

BS 5295 Part 1: Classification - Withdrawn

BS 5295 Part 2: Design - Withdrawn

BS 5295 Part 3: Operation - Current

BS 5295 Part 4: Compliance - Withdrawn

bs en iso 14644 3 metrology test methods5
BS EN ISO 14644-3Metrology & Test Methods

Current Status of BS 5295

BS 5295 Part 0: General Introduction - Current

BS 5295 Part 1: Classification - 14644-1/3

BS 5295 Part 2: Design - 14644-4

BS 5295 Part 3: Operation - Current

BS 5295 Part 4: Compliance - 14644-2

Some of BS5295 Part 1 is not addressed currently and PD6609:2000 is being revised to ‘bridge the gap’.

Part 3:Operation will be covered by 14644-5:FDIS

bs en iso 14644 3 metrology test methods6
BS EN ISO 14644-3Metrology & Test Methods

This part of BS EN ISO 14644 may be used for the characterisation of a cleanroom as described and specified in other parts of BS EN ISO 14644.

Not all cleanroom parameter test procedures are shown.

Other standards may be considered to be applicable

The annexes to this document are ‘informative’. Ie they are not compulsory, but form a ‘recommendation’ for compliance with the standard.

Consequently, throughout the document references are made to ‘or as agreed between customer and supplier’

bs en iso 14644 3 metrology test methods7
BS EN ISO 14644-3Metrology & Test Methods

SUMMARY OF ESSENTIAL CONTENTS:

1. Scope - ISO standard text and also states that alternative methods can be used based on agreement between customer and supplier.

2. Normative - Reference to standardsReference

3. Terms and - Helps understanding, andDefinitions allows document to exist alone

4. Testing - Recommended tests with procedures Procedures and apparatus

5. Test Report - Reporting & documentation

bs en iso 14644 3 metrology test methods8
BS EN ISO 14644-3Metrology & Test Methods

Item 4 forms the crux of this section of the standard.

Recommended tests are listed in table 1. Each test has a procedure in Annex B and a corresponding set of apparatus in Annex C. The section of the standard referencing the test is also given.

Selecting and scheduling of these tests is discussed in Annex A.

bs en iso 14644 3 metrology test methods annex a
BS EN ISO 14644-3Metrology & Test Methods Annex A

ANNEX A (Informative) Choice of recommended tests of an installation and the sequence in which to carry them out

A1 Recommended test procedures

Choice of tests

Table A1: Test checklist for installation properties

Table A2: Test checklist for sequencing

The checklists are useful in that they can be taken from the standard and used as a tool.

bs en iso 14644 3 metrology test methods annex a test selection sequence checklist
BS EN ISO 14644-3Metrology & Test Methods Annex ATest Selection & Sequence Checklist
  • Choose which tests are required
  • Put them in a logical order for your application
  • Where not applicable put N/A
  • Review the schedule of tests
bs en iso 14644 3 metrology test methods annex b
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B1 Airborne Particle Count (for classification)

B2 Ultrafine Particle Count (for characterisation)

B3 Macro Particle Count (for characterisation)

B4 Airflow Test

B5 Pressure Difference Test

B6 Installed Filter Leakage Test

B7 Flow Visualisation

B8 Airflow Direction Test

B9 Temperature Test

B10 Humidity Test

B11 Electrostatic & Ion Generator Test

B12 Particle Deposition Test

B13 Recovery Test

B14 Containment Leak Test

bs en iso 14644 3 metrology test methods annex b12
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

Each section comprises items on:

Principle - what and why

Recommended test procedure - how

Recommended apparatus - with what

Test report - detailed results

bs en iso 14644 3 metrology test methods annex b13
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B1 Airborne Particle Count (for classification)

Airborne test for size distributions with thresholds between 0.1 and 5 microns to certify or verify cleanliness classification

bs en iso 14644 3 metrology test methods annex b14
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B2 Ultrafine Particle Count (for characterisation)

Airborne test for particles with size distribution thresholds less than 0.1 micron for characterisation of the cleanroom

bs en iso 14644 3 metrology test methods annex b15
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B3 Macro Particle Count (for characterisation)

Airborne tests for particles with size distribution thresholds greater than 5 microns for characterisation of the cleanroom

bs en iso 14644 3 metrology test methods annex b16
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B4 Airflow Test

Tests to evaluate airflow velocity, uniformity of airflow velocity and supply air volume depending on classification.

Airflow velocity and uniformity tests are described for use principally in unidirectional systems.

Air volume tests are described for unidirectional, non unidirectional or supply air duct systems.

NB Political correctness avoids terms such as laminar and turbulent flow systems

bs en iso 14644 3 metrology test methods annex b17
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B5 Air Pressure Difference Test

Verification of capability of installation to maintain the specified PD between it and it’s surroundings.

bs en iso 14644 3 metrology test methods annex b18
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B6 Installed Filter Leakage Test

Particle Counter and Photometer tests are both described

Photometer method for ISO 5 and less (ie typically non-unidirectional), and for MPPS Filters with penetrations > 0.005% (H14 and lower to BS EN 1822) Acceptance criteria is 0.01% for all grades.

DPC method more sensitive unidirectional systems. Evaluation of scan rate and allowable particle counts is based on BS EN 1822 part 4 and DIN 24184.

bs en iso 14644 3 metrology test methods annex b19
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B6 Installed Filter Leakage Test

Note error on B6.3.5 formula for scan rate

Sr <= Cc.Ps.K.Dp.Fs/Np is equivalent to

Sr = 472 Cc.Ps.K.Dp/Np

Units should be (cm/s)

bs en iso 14644 3 metrology test methods annex b20
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B7 Flow Visualisation

Tests to demonstrate airflow characteristics in the installation.

Techniques described are by thread, tracer injection or image processing (CFD)

bs en iso 14644 3 metrology test methods annex b21
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B8 Airflow Direction Test

Tests to demonstrate airflow directional characteristics in the installation.

Techniques described are by thread, tracer injection or image processing (CFD)

bs en iso 14644 3 metrology test methods annex b22
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B9 Temperature Test

Tests to demonstrate temperature characteristics in the installation.

Techniques described are for general or more exacting measurement requirements.

bs en iso 14644 3 metrology test methods annex b23
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B10 Humidity Test

Tests to demonstrate the humidity characteristics of the installation using measurements of dew point or relative humidity

Humidity tests should be performed in conjunction with the temperature test.

bs en iso 14644 3 metrology test methods annex b24
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B11 Electrostatic & Ion Generator Test

Tests to evaluate the level of electrostatic charge and dissipation rate in the installation.

Techniques for the measurement of surface voltage and resistance as well as ioniser performance are suggested

bs en iso 14644 3 metrology test methods annex b25
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B12 Particle Deposition Test

Tests to evaluate the level of particulates that can be deposited on work or surfaces in the installation.

Techniques using witness plates or a fall out photometer are suggested.

bs en iso 14644 3 metrology test methods annex b26
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B13 Recovery Test

Test to evaluate the capability of the clean air system to recover from a particle generating event principally in non-unidirectional applications.

bs en iso 14644 3 metrology test methods annex b27
BS EN ISO 14644-3Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods

B14 Containment Leak Test

Test to evaluate the intrusion of contaminated air from surrounding areas using DPC or Photometer methods.

bs en iso 14644 3 metrology test methods annex c
BS EN ISO 14644-3Metrology & Test Methods Annex C

Annex C (Informative) - Test Instruments

Describes test apparatus that should be used for the corresponding recommended tests in Annex B. There is a recommendation that apparatus should be subject to agreement between the customer and the supplier.

The information provided is not limiting, it represents a sensible minimum requirement. Ie Equipment that becomes available through improvements in measurement technology are not restricted by this Annex.

Equally alternate equipment may be suitable and may be used subject to agreement.

bs en iso 14644 3 metrology test methods annex c29
BS EN ISO 14644-3Metrology & Test Methods Annex C

Annex C (Informative) - Test Instruments - example

C1. Discrete Particle Counter (DPC).

C2. Condensation Nucleus Counter (CNC).

C3. Microscope, Cascade Impactor, DPC, Time of Flight.

C4. Anemometers - Thermal, Ultrasonic, Vane, Pitot, Hood.

C5. Manometers - Electronic, Inclined, Mechanical.

C6. Photometer, DPC, Aerosol Generator,

C7. Anemometers, Tracers, Aerosol generator.

C8. Anemometers, Tracers, Aerosol generator.

C9. Liquid in Glass thermometer, Electronic thermometer.

C10. Humidity meters; Capacitive, Hair.

C11. Voltmeter, Ohmmeter, Charged plate monitor.

C12. Microscope, Fall-out Meter.

C13. Discrete Particle Counter (DPC).

C14. Discrete Particle Counter (DPC), Photometer, Aerosol Generator.

bs en iso 14644 3 metrology test methods30
BS EN ISO 14644-3Metrology & Test Methods

UK public comments on this section to BSI need to be made in written form and in an approved format by end December 02 otherwise they will not be considered.

slide31

This presentation has been prepared

and delivered by:-

Wander ter Kuile

McLeod Russel UK Ltd

c/o Vokes Ltd

Henley Park

Guildford

Surrey, GU3 2AF

UK

tel 01483 207236

fax 01483 235384

e-mail wander.ter.kuile@vokes.com