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Sputtering Process - PowerPoint PPT Presentation


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1. ?????? ??. 2. Sputtering???. 1. Target? DC bias? ?? plasma ??2. Ar ion? target?? ??3. ??? ???? ??? ????? ?? 4. ???? ?? ??? ??, ?? ??? ?? . 3. ??? ??? ??? ??. 4. Sputtering ????. Sample loading ??? valve open ??? ??? ?? ? 5?10(-6)? ??? ???? ?? Shutter ????? Presputtering ?? Shutter ????? Sputtering ?? ?? Sample unloading.

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