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SEMI STEP: Introduction to SEMI S2-0706

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SEMI STEP: Introduction to SEMI S2-0706

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    1. SEMI STEP: Introduction to SEMI S2-0706 Short Circuit Current Rating Edward Karl Program Manager Corporate Product EHS Applied Materials

    2. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 2

    3. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 3 Introduction to SEMI S2-0706 NEC Compliance Map

    4. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 4 Introduction to SEMI S2-0706 Definitions “Short circuit current rating” is defined in UL 508A as "The prospective symmetrical fault current at a nominal voltage to which an apparatus or system is able to be connected without sustaining damage exceeding the defined acceptance criteria." “Short circuit current rating” is defined in SEMI S2-0706 and SEMI S22-0706 as "The maximum available current to which an equipment supply circuit is intended to be connected."

    5. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 5 Introduction to SEMI S2-0706 Impact To Semiconductor Industry Per SEMI S2 and SEMI S22 (as well as the NEC, NFPA 79), every semiconductor manufacturing equipment will need to include the short circuit current rating of the equipment or its industrial control panel on the equipment nameplate. As a result of NFPA 79E regarding Arc Flash/Arc Blast requirements, some end-users are now discovering that their facilities may have available fault current that are greater than 10 KA. NEC prohibits the installation of a system with industrial control panel with a lower short circuit current rating than the available fault current from the facility. There is no standard or code specifying the maximum limit for available fault current at a facility.

    6. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 6 Introduction to SEMI S2-0706 Challenges to Semiconductor Industry Since the available fault current at user facilities may vary significantly, equipment suppliers are faced with the challenge of designing a reasonable SCCR for their products: If the SCCR is too high, the cost and footprint of their products may increase. If the SCCR is too low, their products may not be permitted to be connected to the users’ facilities (if the available fault current is higher).

    7. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 7 I. Use a Listed UL 508A Control Panel For a Listed UL 508A Control Panel, the Short Circuit Current Rating would already be included in its nameplate.

    8. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 8

    9. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 9 Introduction to SEMI S2-0706 Common Methods of Increasing SCCR Replacing or removing the lowest SCCR components with ones of higher SCCR. Utilizing a Listed combination tested components that has an overall SCCR that is higher than that of the individual components. Utilizing current limiting devices (e.g., transformer, current limiting fuses, current limiting circuit breakers) Empirically test the components or the entire industrial control panel to determine actual SCCR instead of using calculations. Offer current limiting devices as user facility options to lower the available fault current to the equipment.

    10. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 10 Introduction to SEMI S2-0706 Increasing SCCR of Industrial Control Panel

    11. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 11 Introduction to SEMI S2-0706 Use of Isolation Power Transformers per UL 508A, SB4.3.1

    12. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 12 Introduction to SEMI S2-0706 Use of Current Limiting Feeder Circuit Breaker per UL 508A, SB4.3.2

    13. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 13 Introduction to SEMI S2-0706 Use of Current Limiting Feeder Circuit Breaker Per UL 508A, SB4.3.3 Class CC, G, J, RK1, RK5, and T fuses are marked “Current Limiting” Fuses must be in the feeder circuit Peak current is found from Table SB4.2 based on fuse class and ampere rating. For fuses with ampere rating not in the table, use next higher ampere rating (for a 10 A Class CC fuse, use peak current for 15 A CC fuse) SCCR on the line side of the current limiting fuses cannot exceed SCCR of any branch circuit protection Peak current let-through of current limiting fuses cannot exceed the SCCR determined for any branch circuit on the load side.

    14. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 14 Introduction to SEMI S2-0706 UL 508A, Supplement SB

    15. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 15 Introduction to SEMI S2-0706 Short Circuit Current Rating Questions?

    16. Introduction to SEMI S2-0706 Excerpts from References Revision History REV 1 used at Austin 11/10/2003 2-4pm training. REV2 – 1. Page 16, Part No. 0250-27105 is missing a "0". – FIXED == 2. Page 17, SSPS, "milliTorr" is misspelled – FIXED == 3. Page 22, I don't believe that a hazard alert label on an assembly that is being revised, but the label itself is not changed, the answer should be "No". It should only be "Yes" if the label is moved, deleted, added or revised. – ADDED TEXT BOX DISCUSSING THIS TO SLIDE 22. == page 47 Part no. is missing a digit. – FIXED (SLIDE 4 ALSO). == Q7 (items document) – ADDED EXEMPTION TEXT BOX AND CHANGED TOPIC LIST HIGHLIGHTING FROM RED TO BLUE. == Q2 (flamability) – CHANGED TITLES TO BETTER INDICATE PREFERRED MATERIAL RATINGS, CHANGED “SHEET PLASTICS” GRAPHIC. FIXED UL94V-0 TYPO. == Q11 (flammably material procedures) ADDED CLARIFICATION BOX – “PROCEDURES USED BY CUSTOMER” == Q12 (lifting equipment) ADDED CLARIFICAITON BOX – “LIFTING EQUIPMENT FOR CUSTOMER” == Q18 (safety circuits) RESIZED LIGHT CURTAIN == Q24 (process chemical enclosures) ADDED CLARIFICATION THAT INTERT PROCESS CHEMICALS ARE EXEMPT == Q26 (5xburst pressure) ADDED CLARIFICATION STATEMENT THAT THE SYSTEM WORKING PRESSURE IS THE ONE THE COMPONENT IS EXPOSED TO. [used at SCLA 10am-12 training on 11/11/2003] REV3 – COVER – added slide set revision marker to first slide.: Repositioned some of the intro slides == ADDED “why was safety checklist revised slide – ADDED common sense scope slide (slide 10) == Q13 – fixed mis-spelling of “document” [used at Austin 11/12/2003 10-12 training] REV4 – Added “cell phones to stun” slide. === Q5 – added clarification about spec’ed to bucket parts and “conditions of use” === Q7 – added “revised items” point to slide === Modified Q16 so its number is “16” {not original checklist instructions had two Q16’s but this was corrected with other editorial changes to checklist instructions. } == Q15 Modified laser picture so that target is inside its enclosure and it now is not acting as a barrier === Q16 added “without consideration of shielding” point. REV 5 – Various changes by Carl, Lauren and Joe. Slide 8 – added “NA for PDP” for change doc number == Slide 11 – clarified speaker notes == Question 7 – added note about document 0250-70606. == Q8 – modified text related to lockout valve to make point of why question is needed. == Q11 – corrected grammar in green note == Q13 – corrected reference directions to doc in CEL == Q18 – added label to smoke detector. == Q22 – modified “new units” note to be a bit clearer. == Q24 – deleted note that said inert process chemicals could be exempted (inert process chemicals can not be exempted since they are often dilutetents of non-inerts. REV6 – Got rid of Country Blueprint fonts since they do not display on all systems – replaced with arial italics. Revision History REV 1 used at Austin 11/10/2003 2-4pm training. REV2 – 1. Page 16, Part No. 0250-27105 is missing a "0". – FIXED == 2. Page 17, SSPS, "milliTorr" is misspelled – FIXED == 3. Page 22, I don't believe that a hazard alert label on an assembly that is being revised, but the label itself is not changed, the answer should be "No". It should only be "Yes" if the label is moved, deleted, added or revised. – ADDED TEXT BOX DISCUSSING THIS TO SLIDE 22. == page 47 Part no. is missing a digit. – FIXED (SLIDE 4 ALSO). == Q7 (items document) – ADDED EXEMPTION TEXT BOX AND CHANGED TOPIC LIST HIGHLIGHTING FROM RED TO BLUE. == Q2 (flamability) – CHANGED TITLES TO BETTER INDICATE PREFERRED MATERIAL RATINGS, CHANGED “SHEET PLASTICS” GRAPHIC. FIXED UL94V-0 TYPO. == Q11 (flammably material procedures) ADDED CLARIFICATION BOX – “PROCEDURES USED BY CUSTOMER” == Q12 (lifting equipment) ADDED CLARIFICAITON BOX – “LIFTING EQUIPMENT FOR CUSTOMER” == Q18 (safety circuits) RESIZED LIGHT CURTAIN == Q24 (process chemical enclosures) ADDED CLARIFICATION THAT INTERT PROCESS CHEMICALS ARE EXEMPT == Q26 (5xburst pressure) ADDED CLARIFICATION STATEMENT THAT THE SYSTEM WORKING PRESSURE IS THE ONE THE COMPONENT IS EXPOSED TO. [used at SCLA 10am-12 training on 11/11/2003] REV3 – COVER – added slide set revision marker to first slide.: Repositioned some of the intro slides == ADDED “why was safety checklist revised slide – ADDED common sense scope slide (slide 10) == Q13 – fixed mis-spelling of “document” [used at Austin 11/12/2003 10-12 training] REV4 – Added “cell phones to stun” slide. === Q5 – added clarification about spec’ed to bucket parts and “conditions of use” === Q7 – added “revised items” point to slide === Modified Q16 so its number is “16” {not original checklist instructions had two Q16’s but this was corrected with other editorial changes to checklist instructions. } == Q15 Modified laser picture so that target is inside its enclosure and it now is not acting as a barrier === Q16 added “without consideration of shielding” point. REV 5 – Various changes by Carl, Lauren and Joe. Slide 8 – added “NA for PDP” for change doc number == Slide 11 – clarified speaker notes == Question 7 – added note about document 0250-70606. == Q8 – modified text related to lockout valve to make point of why question is needed. == Q11 – corrected grammar in green note == Q13 – corrected reference directions to doc in CEL == Q18 – added label to smoke detector. == Q22 – modified “new units” note to be a bit clearer. == Q24 – deleted note that said inert process chemicals could be exempted (inert process chemicals can not be exempted since they are often dilutetents of non-inerts. REV6 – Got rid of Country Blueprint fonts since they do not display on all systems – replaced with arial italics.

    17. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 17 Introduction to SEMI S2-0706 Excerpts from Referenced Documents NFPA 70-2005, Article 670.3(A) - Permanent Nameplate. The nameplate shall include the following information: (4) Short circuit current rating of the machine industrial control panel based on one of the following: a. Short circuit current rating of a listed and labeled machine control enclosure or assembly b. Short circuit current rating established utilizing an approved method. NFPA 70-2005, Article 409.110 - Marking. An industrial control panel shall be marked with the following information that is plainly visible after installation: (3) Short-circuit current rating of the industrial control panel based on one of the following: Short-circuit current rating of a listed or labeled assembly Short-circuit current rating established utilizing an approved method (FPN: UL 508A-2001, Supplement SB, is an example of an approved method).

    18. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 18 Introduction to SEMI S2-0706 Excerpts from Referenced Documents NFPA 79-2005 (Accepted Proposal), Section 16.4.1 (currently 17.4.1) - Machine Nameplate Data. A nameplate giving the following information shall be attached to the enclosure: (6) Short-circuit current rating of the control panel. SEMI S2-0706, Section 13.4.12 – A permanent nameplate listing the manufacturer’s name, machine serial number, supply voltage, phase frequency, short circuit current rating of the equipment or its industrial control panel and… SEMI S22-0706, Section 20.4 i) – Equipment Nameplate – A permanent nameplate should be attached to the main electrical enclosure or equipment where it is plainly visible after installation. This nameplate should include the following information: i) short-circuit current rating of the equipment or its industrial control panel…

    19. 12 July 2006 SEMI STEP: Introduction to SEMI S2-0706 19 Introduction to SEMI S2-0706 Excerpts from Referenced Documents UL 508A, First Edition, April 25, 2001 (revised through May 1, 2003) – 52.1 An industrial control panel shall be provided with a nameplate that includes the following: b) Complete electrical rating of each source of supply as specified in 49.1 – 49.5 The input terminals in 49.1 shall have a short circuit current rating. The short circuit rating shall be based on the requirements in Supplement SB. (Effective April 25, 2006). IEC 60204-1 (2005), Clause 16.4 - Marking of equipment. Equipment (for example control gear assemblies) shall be legibly and durably marked in a way that is plainly visible after the equipment is installed. A nameplate giving the following information shall be attached to the enclosure adjacent to each incoming supply: … short-circuit rating of the equipment; …

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