Optical properties of CCD sensors - PowerPoint PPT Presentation

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Optical properties of CCD sensors

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    3. Outline spectral range of CCDs limitations expanding the sensitivity range to the UV backside illumination deep depletion open electrode structure

    4. Infrared sensors choice of materials sensor architecture Hybrid detectors flip-chip technique

    5. Quantum efficiency QE=Nel/Nph depends on wavelength material internal electric fields sensor architecture

    6. QE of silicon CCD red limit: band gap of Si: 1.12 eV corresponds to ?=1.1 m blue limit: not intrinsic, due to surface structure! transparency of electrodes decreases reflection losses increase

    20. Open electrode structure ring shaped electrodes on thick frontside illuminated CCD

    21. Infrared Detector Technology Which material?

    22. Hybrid detectors photosensitive substrate + Silicon read-out circuit = hybrid detector

    23. Substrate array of n-p-photodiodes made from HgCdTe (epitactically grown on transparent carrier (CdZnTe/CdTe, Al2O3/CdTe (Sapphire)) Boron implants to define pixel structure Gold contacts on each pixel

    24. read-out circuit (ROIC) silicon based integrated circuit (CMOS array) with individually adressable pixels

    25. flip-chip-technique substrate and ROIC are electrically connected pixel by pixel Indium bumps

    26. flip-chip detector (Hybrid detector)