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ITRS Factory Integration. Shigeru Kobayashi December 2008 Seoul Korea. 2008 Contributors: Asia

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itrs factory integration

ITRS Factory Integration

Shigeru Kobayashi

December 2008

Seoul Korea

2008 Contributors:

Asia

Seora Park, C. S. Park/ S. H. Park, Kenjiro Nawa, Mikio Otani, Junji Iwasaki, Masazumi Fukushima, Tomoyuki Masui, Michio Honma, Makoto Yamamoto, Nobuo Kanamori, Takayuki Nishimura, Masashi Ohmori, Hiromichi Tani, Shoichi Kodama, Hiroyuki Chuma, Toshiya Hirai, Mikio Furukawa

Europe

Richard Oeschner, Adrian Pyke, Gavin Rider, Andreas Neuber

North America

Terry Francis, Gopal Rao, Al Chasey, Les Marshall, Todd Lasater, Brad van Eck, Daniel Babbs, Dave Eggleston, Mutaz Haddadin, Eric Englhardt, Peter Csatary, Bill Fosnight, Tom Jefferson

slide2

Factory Integration Scope and Drivers

UI

FITWG Thrust Teams

Factory

Operations

Production

Equipment

Factory Information

& Control Systems

AMHS

Facilities

Si Substrate

Mfg

Chip

Mfg

Wafer

Mfg

Product

Mfg

Distribution

Reticle

Mfg

  • FEOL
  • BEOL
  • Probe/Test
  • Singulation
  • Packaging
  • Test

Increasing cost &

Cycle time implications

  • Factory is driven by Cost, Quality, Productivity, Speed, and Flexibility
  • Reduce factory capital and operating costs per function
  • Faster delivery of new and volume products to the end customer
  • Efficient/Effective volume/mix production, high reliability, & high equipment reuse
  • Enable rapid process technology shrinks as well as systematic productivity waste reduction

2008 ITRS Public Conference Seoul, Korea

planned stepwise productivity improvement
Planned Stepwise Productivity Improvement

450mm ?

NGF ?

  • 2008 and future years are targeted to accommodate significant productivity improvement and relevant technology developments

Planning for NGF/450mm

Start of NGF and/or 450mm

Implementation

2008 ITRS Public Conference Seoul, Korea

fi 2008 focus
FI 2008 Focus

2008 ITRS Public Conference Seoul, Korea

what is waste
What is Waste?

2008 ITRS Public Conference Seoul, Korea

wtw in dandori operations and its hierarchical taxonomy
WTW in Dandori Operations and Its Hierarchical Taxonomy

2008 ITRS Public Conference Seoul, Korea

Source: J300P Guidelines Phase1

wait time waste as day mask layer
Wait Time Waste as Day / Mask Layer
  • 2007 Edition introduced elaborated Day/Mask Layer metrics for better cycle time requirement
    • Set of cycle time metrics: interpreted as fab agility against high/low mix environment or variable lot size manufacturing methods
    • Super hot lot values provide base line for cycle time metrics
  • 2009 Edition will add WTW metrics

2008 ITRS Public Conference Seoul, Korea

2009 fitwg focus
2009 FITWG Focus

2008 ITRS Public Conference Seoul, Korea

ad