Semiconductor Processing (front-end). Stuart Muter 617.371.3853 [email protected] 12/02/2002. Semiconductor Processing. Agenda: An overview of the key steps in semi-conductor processing (how to make one of Stuart’s wafers).
Agenda: An overview of the key steps in semi-conductor processing (how to make one of Stuart’s wafers).
A lot of information is in the packet, we will not be able to cover it all.
Section A Introduction to Semiconductor Manufacturing
Section B Key Processing Steps
- Doping and Anneal
Section C Future Trends
SECTION A: Introduction to Semiconductor Manufacturing
Transistor density doubles every 2 years
Source: Design News
Source: WSTS 11/01Semi and Semi-Equipment Industries
Wafer Fab Equipment Spending
Source: Gartner Dataquest (July 2002)
0.5µ CMOS Process FlowDevice Manufacturing
The “big picture” process
Key Processing Steps
Typically PVD or MCVD