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S URFACE ENGINEERING 3. Atomic Layer Deposition (ALD) Technology: Innovative Layer-by-Layer Design of New Materials, State-of-the-Art Surface Engineering & Nanostructuring. Comparison of the coating processes. Pri n cipal sc h em e of ALD. Advantages of ALD (1). Advantages of ALD ( 2 ).

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S URFACE ENGINEERING 3

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S urface engineering 3

SURFACE ENGINEERING 3

Atomic Layer Deposition (ALD) Technology:

Innovative Layer-by-Layer Design of New Materials,

State-of-the-ArtSurfaceEngineering & Nanostructuring


Comparison of the coating processes

Comparison of the coating processes


S urface engineering 3

Principal scheme of ALD


S urface engineering 3

Advantages of ALD (1)


S urface engineering 3

Advantages of ALD (2)


S urface engineering 3

Schematic representation of ALD reactor


S urface engineering 3

Typical films


S urface engineering 3

MLD (Molecular Layer Deposition)


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