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STATUS IN THE CLEAN ROOM Device production Until 12-06-12

STATUS IN THE CLEAN ROOM Device production Until 12-06-12. LHCb – S nake design. 525 um thick! SS polished. SEM PICTURES. LHCb – Snake design. NA62 – Frame 2. Channels too deep. Oxide +Nitride. 2 devices glued from Jerome. 525 um thick! SS polished. 20475 and 20477  broken !.

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STATUS IN THE CLEAN ROOM Device production Until 12-06-12

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  1. STATUS IN THE CLEAN ROOM Device production Until 12-06-12

  2. LHCb – Snake design 525 um thick! SS polished

  3. SEM PICTURES LHCb– Snake design

  4. NA62 – Frame 2 Channels toodeep Oxide +Nitride.... 2 devicesgluedfromJerome 525 um thick! SS polished 20475 and 20477  broken!

  5. NA62 – Dual Banana Surface not clean…. CMP  cracks!! DRY ETCHING with 601 Starts to de-bond!!! SEM PICTURES before after Pool 380 um OK!! Dirty on the backside..

  6. NA62 – Dual Banana 044 SEM PICTURES Pool: Channels: KOH insidechannels:

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