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PolyMUMPS. George Kwei Mirela Cunjalo Gary Lu. Overview. PolyMUMPS Technology Description Our Designs, ideas and problems First-Half Second-Half Questions. PolyMumps. Technology Processes Designed to be as General as Possible 3 polysilicon layers + 1 metal layer

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Polymumps

PolyMUMPS

George Kwei

Mirela Cunjalo

Gary Lu


Overview
Overview

  • PolyMUMPS Technology Description

  • Our Designs, ideas and problems

    • First-Half

    • Second-Half

  • Questions


Polymumps1
PolyMumps

  • Technology Processes Designed to be as General as Possible

  • 3 polysilicon layers + 1 metal layer

  • Oxide – sacrificial layer

  • Holes – removes Polysilicon

  • Anchors – removes Oxide

  • Dimples


First half stepper motor
First-Half [Stepper Motor]

  • Stepper Motor using Heatuators

    • What are Heatuators?


First half stepper motor1
First-Half [Stepper Motor]

  • SolidWorks – Heatuator Array


First half stepper motor2
First-Half [Stepper Motor]

  • Problem with existing design

    • Placement of pads

    • No dimples

    • Remove staple

    • More Heatuators required



First half stepper motor4
First-Half [Stepper Motor]

  • SolidWorks – Stepper Motor Animations


First half stepper motor5
First-Half [Stepper Motor]

  • Variations in New Designs


Second half initial design
Second-Half [Initial Design]

  • Switch via a Gear Train … Too ambitious!



Second half alternating switch1
Second-Half [Alternating Switch]

  • SolidWorks – Alternating Switch Animation


Second half regulated motor
Second-Half [Regulated Motor]

  • Basic Idea


Second half regulated motor1
Second-Half [Regulated Motor]

Problems to consider

  • High Tension of Spring

    • Need more Heatuators

    • Need longer Spring

  • Spacing of Teeth

  • Length of the bar


Second half regulated motor2
Second-Half [Regulated Motor]

  • Calculations:

    • Spring/Tension

      Compliance :

      C = L3 / (E * I) * (N/12 + 1/48)

      L - length of the bars

      E - Young’s Modulus

      N - # of bars

      I - 2nd moment of the bars

      Moment:

      I = 1/12 * w * h3

      w - width of the bars

      h - thickness.


Second half regulated motor3
Second-Half [Regulated Motor]

  • Calculations:

    • Number of Heatuators

      F = k * x * µ

      x - distance the spring is stretched

      K - spring constant (C-1)

      µ - coefficient of static friction between polySilicon and polySilicon (4.9 ± 1.0)

      d = do*N + C / N * F

      d - deflection

      do – no-load deflection for one heatuator

      N - number of heatuators

      F - opposing force


Second half regulated motor4
Second-Half [Regulated Motor]

  • Solutions – variation 1

    • Pull-Ring


Second half regulated motor5
Second-Half [Regulated Motor]

  • Solutions – variation 2

    • Longer Spring (Pull-Ring)


Second half regulated motor6
Second-Half [Regulated Motor]

  • SolidWorks – Pullring Animation


Second half regulated motor7
Second-Half [Regulated Motor]

  • Solutions – variation 3

    • Linear Stepper-Motor



Ratchet motor1

a2

a1

d1

d2

Ratchet Motor

  • Calculations:

    • Flexture


Ratchet motor2
Ratchet Motor

  • SolidWorks – Animation


Conclusion
Conclusion

  • What we learned:

    • use lots of instances for Cadence

    • make sure snap to grid is at 1.0 micron

    • make sure all geometries are uniform numbers

    • carefully go over design rules first, minimum distances, etc.

    • Fix all the errors on one design before proceeding to the next

    • Discuss designs with TAs before making them in Cadence

    • Designs should correspond to at least 3x the calculations, to make sure everything will work


Questions

Questions?

PolyMUMPS

Mirela Cunjalo

George Kwei

Gary Lu


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