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PolyMUMPS. George Kwei Mirela Cunjalo Gary Lu. Overview. PolyMUMPS Technology Description Our Designs, ideas and problems First-Half Second-Half Questions. PolyMumps. Technology Processes Designed to be as General as Possible 3 polysilicon layers + 1 metal layer

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Presentation Transcript
polymumps

PolyMUMPS

George Kwei

Mirela Cunjalo

Gary Lu

overview
Overview
  • PolyMUMPS Technology Description
  • Our Designs, ideas and problems
    • First-Half
    • Second-Half
  • Questions
polymumps1
PolyMumps
  • Technology Processes Designed to be as General as Possible
  • 3 polysilicon layers + 1 metal layer
  • Oxide – sacrificial layer
  • Holes – removes Polysilicon
  • Anchors – removes Oxide
  • Dimples
first half stepper motor
First-Half [Stepper Motor]
  • Stepper Motor using Heatuators
    • What are Heatuators?
first half stepper motor1
First-Half [Stepper Motor]
  • SolidWorks – Heatuator Array
first half stepper motor2
First-Half [Stepper Motor]
  • Problem with existing design
    • Placement of pads
    • No dimples
    • Remove staple
    • More Heatuators required
first half stepper motor4
First-Half [Stepper Motor]
  • SolidWorks – Stepper Motor Animations
first half stepper motor5
First-Half [Stepper Motor]
  • Variations in New Designs
second half initial design
Second-Half [Initial Design]
  • Switch via a Gear Train … Too ambitious!
second half alternating switch1
Second-Half [Alternating Switch]
  • SolidWorks – Alternating Switch Animation
second half regulated motor1
Second-Half [Regulated Motor]

Problems to consider

  • High Tension of Spring
    • Need more Heatuators
    • Need longer Spring
  • Spacing of Teeth
  • Length of the bar
second half regulated motor2
Second-Half [Regulated Motor]
  • Calculations:
    • Spring/Tension

Compliance :

C = L3 / (E * I) * (N/12 + 1/48)

L - length of the bars

E - Young’s Modulus

N - # of bars

I - 2nd moment of the bars

Moment:

I = 1/12 * w * h3

w - width of the bars

h - thickness.

second half regulated motor3
Second-Half [Regulated Motor]
  • Calculations:
    • Number of Heatuators

F = k * x * µ

x - distance the spring is stretched

K - spring constant (C-1)

µ - coefficient of static friction between polySilicon and polySilicon (4.9 ± 1.0)

d = do*N + C / N * F

d - deflection

do – no-load deflection for one heatuator

N - number of heatuators

F - opposing force

second half regulated motor4
Second-Half [Regulated Motor]
  • Solutions – variation 1
    • Pull-Ring
second half regulated motor5
Second-Half [Regulated Motor]
  • Solutions – variation 2
    • Longer Spring (Pull-Ring)
second half regulated motor6
Second-Half [Regulated Motor]
  • SolidWorks – Pullring Animation
second half regulated motor7
Second-Half [Regulated Motor]
  • Solutions – variation 3
    • Linear Stepper-Motor
ratchet motor1

a2

a1

d1

d2

Ratchet Motor
  • Calculations:
    • Flexture
ratchet motor2
Ratchet Motor
  • SolidWorks – Animation
conclusion
Conclusion
  • What we learned:
    • use lots of instances for Cadence
    • make sure snap to grid is at 1.0 micron
    • make sure all geometries are uniform numbers
    • carefully go over design rules first, minimum distances, etc.
    • Fix all the errors on one design before proceeding to the next
    • Discuss designs with TAs before making them in Cadence
    • Designs should correspond to at least 3x the calculations, to make sure everything will work
questions

Questions?

PolyMUMPS

Mirela Cunjalo

George Kwei

Gary Lu

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