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Studying micro-objects with SEM (Scanning electron microscope)

Studying micro-objects with SEM (Scanning electron microscope). Student: Michał Łępicki (Warsaw University of Technology ) Supervisor : Oleg Leonidovich Orelovich Center of Applied Physics of Flerov Laboratory of Nuclear Reactions JINR. Introduction. Introduction. Introduction.

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Studying micro-objects with SEM (Scanning electron microscope)

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  1. Studying micro-objects with SEM (Scanning electron microscope) Student: Michał Łępicki (Warsaw University of Technology) Supervisor: Oleg Leonidovich Orelovich Center of Applied Physics of Flerov Laboratory of Nuclear Reactions JINR

  2. Introduction

  3. Introduction

  4. Introduction

  5. Introduction

  6. Introduction

  7. Introduction

  8. Introduction

  9. Introduction

  10. Introduction

  11. Introduction

  12. Introduction

  13. Program of practices • Layout and performance of SEM • Preparing and coating samples • Operating SEM • Electron data processing

  14. Layout and performance of SEM 1-3 Electron gun 4, 10 Aperture 5-6 Condenser lenses 7 Scanning coils 8 Stigmator 9 Objective lens 11 X-ray detector 12 Pre-amplifier 13 Scanning circuits 14 Specimen 15 Secondary electron detector 16-18 Display/Control circuits

  15. Layout and performance of SEM

  16. Preparing and coating samples General view of ion sputter

  17. Preparing and coating samples

  18. Reasons of coating specimens • The surface of sample must be electro conductive to minimalize charging from beam • The surface must be thermo conductive to minimalize local heating • The material of sample must have a high atomic number to increase secondary electron emission

  19. Preparing and coating samples

  20. Preparing and coating samples Gold coated sample Sample without coating

  21. Operating SEM

  22. Preparing and coating samples Tilt 0 deg – shadowless illumination Tilt 30 deg

  23. TILT Operating SEM Tilt 30 deg Tilt 0 deg

  24. A/D Electron data processing

  25. Electron data processing N=1,75*10^7 [channels/cm^2] R=0,5μm average channel radius 13,8% surface cross section (SCS) SCS= Pi*R^2*N*100%

  26. Drain water 70ml filtrated

  27. Drain water 70ml filtrated

  28. Puddle water 50ml filtrated

  29. Puddle water 50ml filtrated

  30. Me operating SEM

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