nanofab trainer update
Download
Skip this Video
Download Presentation
NanoFab Trainer Update

Loading in 2 Seconds...

play fullscreen
1 / 15

NanoFab Trainer Update - PowerPoint PPT Presentation


  • 99 Views
  • Uploaded on

NanoFab Trainer Update. Nick Reeder, January 17, 2014. Updates to User Interface. Uploaded Andrew’s seventeen PDF-file chapters to the Tutorial page, and sent list of possible typos to Andrew. File menu now has distinct Save As… and Save options . Window’s title bar shows filename.

loader
I am the owner, or an agent authorized to act on behalf of the owner, of the copyrighted work described.
capcha
Download Presentation

PowerPoint Slideshow about ' NanoFab Trainer Update' - thom


An Image/Link below is provided (as is) to download presentation

Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author.While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server.


- - - - - - - - - - - - - - - - - - - - - - - - - - E N D - - - - - - - - - - - - - - - - - - - - - - - - - -
Presentation Transcript
nanofab trainer update

NanoFabTrainer Update

Nick Reeder, January 17, 2014

updates to user interface
Updates to User Interface
  • Uploaded Andrew’s seventeen PDF-file chapters to the Tutorial page, and sent list of possible typos to Andrew.
  • File menu now has distinct Save As… and Save options.
  • Window’s title bar shows filename.
  • Buttons in dialog boxes respond to key presses as well as mouse clicks.
  • Partially implemented Jamshid’s suggestion to make graphs more easily accessible.
updates to wet etch code
Updates to Wet Etch Code
  • Etched edges of masked SiO2 are now tapered instead of vertical.
updates to spin coat code
Updates to Spin Coat Code
  • Fixed problem of photoresist “spikes” reported in November by Jamshid’s student Chico.
updates to sputter luts
Updates to Sputter LUTs
  • Updated the sputter look-up tables to include the deposition rates (for Ag, Al, Al203, Cr, Cu, Ge, Ti, SiO2) that Andrew sent on March 6, 2013.
    • Still need sputter data for Au, Ni, Pt, W, Si3N4, Ta2O5, TiO2, Si.
  • In many cases, rejected some of the original numbers as outliers or because they were inconsistent with linear interpolation from other numbers.
  • See following slides.
to do list
To-Do List
  • Implement look-up tables to compute deposition rates forCVDbased on user-supplied pressure & temperature.
  • Populate evaporation look-up tables with values.
  • Populate sputter look-up tables for Au, Ni, Pt, W, Si3N4, Ta2O5, TiO2, Si.
  • Fix expose,develop, polish code to compute depth from user-supplied values.
  • Continue writing bake code; need realistic values for S0 and .
  • In expose code, implement diffraction of UV in air and absorption within resist, with dependence on solvent content from bake code.
  • Fix etch code so that (for photoresist) etch rates depend on solvent content from bake code.
  • Fix spin-coat code so that resist does not adhere to underside of horizontal surfaces.
  • Write new code for
    • Lift-off
    • Clean
    • Profilometer
  • Write time-cost-quality code for all operations.
  • Write online help text.
  • Produce videos for Videos tab.
ad