Proximity Effect. 游明峰. Outline. 1 What is the proximity effect? 2 Proximity Effect Correction 3 Conclusion 4 Reference. 1 What is the proximity effect ?. It's due to the scattering of electrons in substrate and resist. Electrons will not only expose the resist
1 What is the proximity effect?
2 Proximity Effect Correction
It's due to the scattering of electrons in substrate
and resist. Electrons will not only expose the resist
at the position they are applied, but also in their
long range neighborhood.
(b)choosing the resist or substrate thickness
(c)increasing the energy of the electrons in the beam
(d)step by step exposure of the resist
A computationally similar approach to dose modulation
is pattern biasing.In this approach,the extra dose that dense
patterns receive is compensated for by slightly reducing their
The advantage of electron beam lithography
machines is their ability to produce small feature
sizes.But as feature sizes decrease the proximity
Effect becomes more and more important.
For that reason everybody running an e-beam will
see the proximity effect in near future..
(3)Philip Coane,”Introduction to Electron Beam