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Proximity Effect. 游明峰. Outline. 1 What is the proximity effect? 2 Proximity Effect Correction 3 Conclusion 4 Reference. 1 What is the proximity effect ?. It's due to the scattering of electrons in substrate and resist. Electrons will not only expose the resist

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Proximity Effect

游明峰


Outline

1 What is the proximity effect?

2 Proximity Effect Correction

3 Conclusion

4 Reference


1 What is the proximity effect ?

It's due to the scattering of electrons in substrate

and resist. Electrons will not only expose the resist

at the position they are applied, but also in their

long range neighborhood.


Reducing the proximity effect:

(a)multilayer resists

(b)choosing the resist or substrate thickness

(c)increasing the energy of the electrons in the beam

(d)step by step exposure of the resist


2 Proximity Effect Correction

(a)Dose Modulation:



(b)Pattern biasing

A computationally similar approach to dose modulation

is pattern biasing.In this approach,the extra dose that dense

patterns receive is compensated for by slightly reducing their

size.




3 Conclusion

The advantage of electron beam lithography

machines is their ability to produce small feature

sizes.But as feature sizes decrease the proximity

Effect becomes more and more important.

For that reason everybody running an e-beam will

see the proximity effect in near future..


4 Reference

(1)www.nnf.cornell.edu/SPIEBook/spie4.htm

(2)www,aiss.de/PROXECCO?PROXECCO.html

(3)Philip Coane,”Introduction to Electron Beam

Lithography”


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