Mems based seismic and vibration sensors in building structural health monitoring systems
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“MEMS based seismic and vibration sensors in Building & Structural Health Monitoring systems”. Sean Neylon: Chief Executive Officer, Colibrys Switzerland SA Founder 35+ years of experience in Micro-Electronics and Micro-Systems (MEMS)

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Mems based seismic and vibration sensors in building structural health monitoring systems

“MEMS based seismic and vibration sensors in Building & Structural Health Monitoring systems”

  • Sean Neylon: Chief Executive Officer, Colibrys Switzerland SA

  • Founder

  • 35+ years of experience in Micro-Electronics and Micro-Systems (MEMS)

  • Former Chairman of NEXUS, the European Microsystems Networking Association

  • Formerly with GEC Marconi, Plessey, Micronas, CSEM


Contents

Contents

The world of Seismic sensing

SHM in context of Seismic Market supply chain & applications

Sensor Classification & standards

Driving forces for Structural monitoring applications

Technology Roadmap for MEMS based Strong Motion seismic sensors

Conclusions


Seismic sensing applications

Seismic sensing Applications

Energy

Subsurface imaging (Oil, Gas, Geothermal)

Defense

Nuclear, Tunneling,

Remote monitoring

Civil protection

Civil Engineering

Structural

monitoring

Geoscience

Geotechnics

  • Volcanic eruptions

  • Avalanches, landslides

  • Soil/rock mechanics

    Geodesy

    Geophysics ‘Free field’

  • Techtonics

  • Volcanic

  • Site evaluation

  • Shake maps

  • Subsoil, microzonation

  • Requalification of structures

  • Land Use planning

    Construction

  • Pile driving, Compaction

  • Tunneling

  • Blasting, Mining

  • Quarrying, Demolition

    Industrial equipments

  • Nuclear Power plants

  • Dams, embankments

  • Bridges / Tunnels / Towers

  • LNG / Oil / Gas storage

  • Pipeline

  • Landfills

  • Tunnel monitoring

  • Traffic

    • (Rail and Road) monitoring

  • Large Buildings

    • Medical centers

Rapid response, early

warning, public

information

  • Earthquake

  • Tsunami

  • Volcanic explosion

    • Landslip


  • Market supply chain

    Market supply chain

    Insurance Security

    ‘Building’ owners

    Consultants

    Government Agencies

    Universities

    Construction & Demolition companies

    System integrator

    Sensors, DS , SW + communications

    Regional suppliers

    N. America: Nanometrics, Kinemetric/Metrozet, Reftek

    EMEA:

    Syscom, Geosig, Guralp

    Asia:

    Mitsubishi, Kokusai, Aimil

    Hardware integrator

    Sensors + data recording + interface electronics

    Sensor Technology

    SM FBAs: Nanometrics, Kinemetrics, Guralp, Harbin

    SM MEMS: Colibrys, SDI, ADI

    Strain, Velocity

    Sensor manufacturer


    Structural health monitoring sensors

    Structural Health Monitoring Sensors

    Broadly 4 families of sensors

    Velocity: Broadband (high sensitivity), Short period and Strong motion velocity

    Accelerometers: „Strong Motion“ Class A-D

    Strain/Displacement:

    Positioning: GPS

    Important Standards:

    National e.g. USGS....

    Regional e.g. State of California......


    Classification strong motion

    Classification - Strong Motion

    Class A

    Typically electromechanical Force Balance Accelerometers

    5g (±3.5g +1g)

    High sensitivity, high linearity, low frequency response

    Expensive, fragile, low volume capacity, medium power

    Primary application: National (>70km spacing) and Regional (3-30km) networks

    Class B

    Typically MEMS closed loop sensor design

    5g (±3.5g +1g)

    Medium sensitivity, medium linearity, medium frequency response, medium power

    Relatively inexpensive, robust, medium volume,

    Primary application: Regional, Urban (<4Km) networks and Structural Health monitoring, Shake maps, modelling validation

    Class C

    Typically MEMS open loop based sensors

    5g (±3.5g +1g)

    Low dynamic range/resolution, low linearity, medium frequency response, low power

    Inexpensive, robust, Medium / high volume,

    Primary application: Earthquake detection & intervention


    Strong motion standards class a

    Strong Motion StandardsClass A

    Specifications: USGS & ANSS specifications (13 June 2007)

    Technical:

    Range: >± 4.5 g , (± 3.5 g + 1 g gravity)

    Noise:

    Must: 145dB (0.02-2Hz); 130dB (2-50Hz)

    Nonlinearity: ≤ 1 % (at full scale)

    Temperature: Operating range: -20°C to 70°C, Temperature error over full Temperature span: < 2%, Offset drift: < 0.5 mg /°C

    Self-test: Must

    No steps in Bias

    Lifetime: 5 years


    Strong motion standards class b

    Strong Motion StandardsClass B

    State of California specifications are a dominant standard

    Technical:

    Range: ± 5 g , (± 4 g + 1 g gravity)

    Noise:

    Must: .03 mg RMS over .02 to 100 Hz BW (87.3dB (0.1-35Hz)

    Wish: < 500 µg/√Hz in 1 to 100 Hz band

    Nonlinearity: ≤ 1 % (at full scale)

    Temperature: Operating range: -20°C to 70°C, Temperature error over full Temperature span: < 2%, Offset drift: < 0.5 mg /°C

    Self-test: Must

    No steps in Bias

    Lifetime: 10 years


    Market size by application grade

    Market size by application & grade

    100dB

    1 µg/√Hz

    120dB

    300ng/√Hz

    140dB

    30ng/√Hz

    Class C

    Class B

    Class A

    Energy

    Oil and gas, discovery & reservoir monitoring

    100

    • Market Size $Mio

    National earthquake monitoring

    10

    Regional & Urban earthquake monitoring

    ‘Ground shake’ maps, Structural modeling & monitoring

    Earthquake detection & intervention

    Subsurface

    Mining & Downhole imaging

    1

    TAM: Internal estimates 2007-2010

    Sensor level valuation

    Market size and growth are drivers in innovation!

    • Performance

    • S/N Dynamic range dB

    9


    Competitive supply base today

    Competitive supply base - today

    100dB

    1 µg/√Hz

    120dB

    300ng/√Hz

    140dB

    30ng/√Hz

    Class C

    Class B

    Class A

    Nanometrics

    Kinemetrics

    Electromechanical

    FBA

    1000

    Harbin

    SF1600

    SF1500

    SF2006

    SF2005

    • Price per axis ($)

    MS9005

    100

    Colibrys

    Consumer

    MEMS

    10

    MEMS Open loop

    FBA

    MEMS Closed loop

    • Performance

    • S/N Dynamic range dB

    10


    Sf2006 product parts

    SF2006 Product Parts

    Mechanical Sensor

    Closed Loop Sigma-Delta ASIC

    PCB + electronic components

    Derivative of Oil/Gas ‘geophone’

    Class B +/-5g seismic sensor

    State of California compliant

    RoHS compliant


    Mems based seismic and vibration sensors in building structural health monitoring systems

    Competitive position - today


    Competitive position today

    Competitive position - today

    100dB

    1 µg/√Hz

    120dB

    300ng/√Hz

    140dB

    30ng/√Hz

    Class C

    Class B

    Class A

    Nanometrics

    Kinemetrics

    Electromechanical

    FBA

    1000

    Harbin

    SF1600

    SF1500

    SF2006

    SF2005

    • Price per axis ($)

    100

    MS9005

    Colibrys

    Consumer

    MEMS

    10

    MEMS Open loop

    FBA

    MEMS Closed loop

    • Performance

    • S/N Dynamic range dB

    13


    Competitive position roadmap

    Competitive position - Roadmap

    100dB

    1 µg/√Hz

    120dB

    300ng/√Hz

    140dB

    30ng/√Hz

    Class C

    Class B

    Class A

    Episensor

    Kinemetrics

    1000

    Electromechanical

    FBA

    Harbin

    MEMS

    Class A/B

    • Price per axis in USD

    MEMS Class B

    100

    Colibrys

    MSxxxx

    Lower cost

    MEMS

    10

    MEMS Open loop

    FBA

    MEMS Closed loop

    • Performance

    • Dynamic range dB

    14


    Strong motion roadmap

    Strong Motion Roadmap

    MEMS based Class B sensors

    Smaller size, lower power, improved linearity, extended FS range

    Integrated wireless

    Lower power / energy harvesting

    MEMS based ‘Class A’ sensors

    Lower cost, more robust, lower power, smaller size


    Target specifications

    Target specifications

    • Goal is to replace traditional electromechanical devices (FBA) with closed loop MEMS technology


    Class a mems sensor prototype

    Class A MEMS Sensor prototype

    Prototype

    10 g FS

    Inertial MEMS sensor

    Sensor component

    MEMS and FE ASIC in ceramic MCM

    PCB board

    FPGA

    Power supplies, clock

    Ethernet controller (for testing)

    Size

    Current board: 10 cm x 10 cm x 4mm

    Potential to make it much smaller

    Market Beta site sampling 2011/12

    Conceptual drawing


    Mems based seismic and vibration sensors in building structural health monitoring systems

    Conclusions:MEMS continue to be a strong technology for new Strong Motion Seismic sensor developmentMy interests are today to: 1. Find potential interested partners for new MEMS Class A sensors?2. Understand objectives of Seismic sensor development within MEMCON FP7 ?3. Confirm if our market assessment is realistic?4. Increase awareness: Europe has a real solution in hand to counter US/HP long term roadmaps


    Mems based seismic and vibration sensors in building structural health monitoring systems

    Many thanks for listening to me!Many thanks to Philippe Krebs at Colibrys for his assistance in providing market details. “multi-cultural, small, fast, flexible, a symbol of creativity and fertility, strongly territorial, successful through intelligent mutation” – culture of Colibryswww.colibrys.com


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