Granite table 1000×1500×500, 2.2tons

1. Level Jack < 5000kg CFRP Dec. 04,’03 KEK H. Yamaoka Granite table 1000×1500×500, 2.2tons SUS Channel 100x50 → 150x75

2. FEM Model ・ Thermal Effect(±1℃) ・ Deformation due to self-weight ・ Resonant frequency ・ P.S.D

3. Thermal Effect(±1℃) CFRP SUS Granite SUS SUS Granite CFRP Young’s modulus(kg/mm2) : 2.1×104 4.8 ×103 1.5×104 Density(×10-6kg/mm3) : 7.85 2.8 1.6 Thermal expansion coeff.(×10-6/℃): 17 8 0.

4. +1℃ P1 -1℃ P2 P2 = +16mm P2 = -16mm P1-P2 = 4.1mm P1-P2 = 4.1mm P1 P2 Self-weight + +1℃ Self-weight + -1℃ P2 = +11mm P2 = -23mm P1-P2 = 4.3mm P1-P2 = 3.8mm P2 P1 Self-weight CFRP SUS Granite P2 = -6mm P1-P2 = 0.23mm SUS

5. CFRP→ GFRP or Alumina(Ceramics) SUS → GFRP or Alumina(Ceramics) Granite SUS GFRP Alumina Granite Young’s modulus(kg/mm2) : 4.5×103 1.5×1043.5×104 Density(×10-6kg/mm3) : 2 2.9 2.8 Thermal expansion coeff.(×10-6/℃): 7, 23 8 7.8 Alumina ceramics, most widely used material among fine ceramics, has same sintered crystal structure (Al2O3) as Sapphire and Ruby. Its application is widely used due to its superb properties such as high insulation, high strength, high wear-resistance and chemical resistance.

6. P1 P2 Ref. bar Side plate Base plate Granite SUS Deformation @P2 Unit: mm Difference(P1-P2) Unit: mm

7. P1 P2 Self-weight Alumina Alumina Granite P2 = -4.5mm P1-P2 = 0.18mm SUS +1℃ -1℃ P2 = +13mm P2 = -13mm P1-P2 = 0.09mm P1-P2 = 0.09mm Self-weight + +1℃ Self-weight + -1℃ P2 = +9mm P2 = -18mm P1-P2 = 0.3mm P1-P2 = 0.1mm

8. 3rd: 143Hz 1st: 88Hz CFRP SUS Granite SUS 4th: 239Hz 2nd: 110Hz Resonant Frequencies

9. X-direction R C L 0.5nm/Hz1/2 Y X Z Fixed Z-direction Y-direction 0.3nm/Hz1/2 0.03nm/Hz1/2