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Vertical furnace - PowerPoint PPT Presentation

Introduction and application. Dopant solid solubility and sheet resistance. Microscopic view point: diffusion equations.

Chapter 7 Dopant Diffusion. Introduction and application. Dopant solid solubility and sheet resistance. Microscopic view point: diffusion equations. Physical basis for diffusion. Non-ideal and extrinsic diffusion. Dopant segregation and effect of oxidation.

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Vertical furnace - PowerPoint PPT Presentation

Introduction and application. Dopant solid solubility and sheet resistance. Microscopic view point: diffusion equations.