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Relationship Between in-situ Information and ex-situ Metrology in Metal Etch Processes

Relationship Between in-situ Information and ex-situ Metrology in Metal Etch Processes. Jill Card, An Cao, Wai Chan, Bill Martin, Yi-Min Lai IBEX Process Technology, A division of NeuMath, Inc. Outline. Background What we want for APC The current situation in IC fabrication

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Situ information - PowerPoint PPT Presentation

Relationship Between in-situ Information and ex-situ Metrology in Metal Etch Processes