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Selective mask - PowerPoint PPT Presentation

SiO 2 properties and applications. Thermal oxidation basics. Manufacturing methods and equipment.

Chapter 6 Thermal oxidation and the Si/SiO 2 interface. Si(s) + O 2 (g) ? SiO 2 (s). SiO 2 properties and applications. Thermal oxidation basics. Manufacturing methods and equipment. Measurement methods. Deal-grove model (linear parabolic model).

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Selective mask - PowerPoint PPT Presentation

SiO 2 properties and applications. Thermal oxidation basics. Manufacturing methods and equipment.