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THE MONOLITHIC 3D-IC: Logic + eDRAM on top

THE MONOLITHIC 3D-IC: Logic + eDRAM on top . How get single crystal silicon layers at less than 400 o C (Required for stacking atop copper/low k). How are all SOI wafers manufactured today?. Cleave using 400 o C anneal or sideways mechanical force. CMP. Hydrogen implant of top layer.

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Same logic core - PowerPoint PPT Presentation

THE MONOLITHIC 3D-IC: Logic + eDRAM on top