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A Cost-Driven Lithographic Correction Methodology Based on Off-the-Shelf Sizing Tools

A Cost-Driven Lithographic Correction Methodology Based on Off-the-Shelf Sizing Tools. Outline. Introduction Trends in mask cost Design for value The cost of correction problem Cost of Correction Methodology Mapping the MinCorr problem to conventional performance optimization

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Opc correction - PowerPoint PPT Presentation

A Cost-Driven Lithographic Correction Methodology Based on Off-the-Shelf Sizing Tools