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Effects of Pad Properties on Cu Dishing During CMP

Effects of Pad Properties on Cu Dishing During CMP. Caprice Gray PhD Student, Mechanical Engineering Tufts University, Medford, MA Intel Intern Presentation 8/18/05. Overview. Goal: Investigate Cu line dishing during CMP using polishing pads with varying properties

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528 views • 24 slides

Breakout Report on Electronic and Photonic Materials

Breakout Report on Electronic and Photonic Materials. Identification for Grand Challenges Ralph Nuzzo, Sadasivan Shankar ( Ack : W. Joos t) August 7, 2012. Breakout Electronic and Photonic Materials. Chairs: Ralph G. Nuzzo (University of Illinois) Sadasivan Shankar (Intel)

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254 views • 16 slides

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Feature width - PowerPoint PPT Presentation

Effects of Pad Properties on Cu Dishing During CMP

Breakout Report on Electronic and Photonic Materials