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Dry Etching of Copper Using Plasma

Dry Etching of Copper Using Plasma. Kejun Xia Semiconductor TCAD Lab. Auburn University, AL Oct 19, 2003. Outline. Background Introduction > Why Copper & low k for IC Interconnection > Some methods of getting fine copper lines Halogens Plasma Etching > Chlorine Plasma Etching

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Dry Etching of Copper Using Plasma