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Surface treatment of SiC using NF 3 /O 2 plasma

Surface treatment of SiC using NF 3 /O 2 plasma. Class presentation by Liu Yen Kang e-mail: L1492@ms35.hinet.net September 2002. Outline . Introduction of silicon carbide Surface treatment of SiC Wet etching Dry etching- RIE, ECR, ICP Conclusions.

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Surface treatment of SiC using NF 3 /O 2 plasma