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Displaced target atoms - PowerPoint PPT Presentation

Introduction and application. Ion implantation tools. Dopant distribution profile.

Chapter 8 Ion implantation. Introduction and application. Ion implantation tools. Dopant distribution profile. Mask thickness and lateral distribution. Effect of channeling. Modeling: nuclear and electronic stopping. Damage caused by ion implantation. Damage repair.

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Displaced target atoms - PowerPoint PPT Presentation

Introduction and application. Ion implantation tools. Dopant distribution profile.