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Device gates - PowerPoint PPT Presentation

Front-End-Of-Line Variability Considerations

Front-End-Of-Line Variability Considerations. EE/MatE 167 David Wahlgren Parent. Introduction. FEOL variability affects the response of discrete electrical components. transistors, capacitors, resistors MOSFET Poly gate length Spacer widths Gate oxide thickness

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Front-End-Of-Line Variability Considerations