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Low K materials

Low K materials. Kejun Xia Auburn University,AL Nov 20, 2003. outline. Why Low k ? Questions Requirements for Low k General ways to gain Low k Low k materials Plasma process in Low k materials Conclusions Answers. Questions.

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Effect of post processes on characteristics of SSG dielectrics

Effect of post processes on characteristics of SSG dielectrics. Experiment. << Original process >>. << Modified process >>. Dipping I (Precursor adsorption). Dipping I (Precursor adsorption). Dipping II (Washing). Dipping II (Washing). 10 cycles. 10 cycles. Dipping III

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350 views • 25 slides

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2 plasma treatment - PowerPoint PPT Presentation

Low K materials

Effect of post processes on characteristics of SSG dielectrics