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Mechanism of k -value Reduction of PECVD Low- k Films Treated with He/H 2 Ash Plasma

Mechanism of k -value Reduction of PECVD Low- k Films Treated with He/H 2 Ash Plasma A.M. Urbanowicz, M. Cremel, K. Vanstr eel s, D. Shamiryan, S. De Gen dt , M.R. Baklanov. Outline. Introduction organic removal from low- k by He/H 2 -DSP * ash

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2 dsp - PowerPoint PPT Presentation

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Mechanism of k -value Reduction of PECVD Low- k Films Treated with He/H 2 Ash Plasma