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1st ionization - PowerPoint PPT Presentation

Lecture 11.0

Lecture 11.0. Etching. Etching. Patterned Material Selectivity is Important!! Un-patterned. Dry Etch An-isotropic dy/dt:dx/dt:6 Gas Phase Reaction with volatile products Frequent use of very reactive species in a Plasma Si Etch SiO 2 Etch Metal Etch. Wet Etch =Dissolution

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1st ionization - PowerPoint PPT Presentation

Lecture 11.0