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The Plasma Physics and Radiation Technology master programme is managed by three groups organizing the four main themes: Equilibrium and Transport in Plasmas (Prof. M.C.M. van de Sanden) Elementary processes in Gasdischarges (Prof. G.M.W. Kroesen) Coherence and Quantum Technology

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  • The Plasma Physics and Radiation Technology master programme is

  • managed by three groups organizing the four main themes:

  • Equilibrium and Transport in Plasmas

    • (Prof. M.C.M. van de Sanden)

  • Elementary processes in Gasdischarges

    • (Prof. G.M.W. Kroesen)

  • Coherence and Quantum Technology

    • (Prof. K.A.H. van Leeuwen)


  • The master track Plasma Physics and Radiation Technology is

  • The track embraces subjects such as:

  • the generation of plasma’s (including Nuclear Fusion),

  • plasma-surface interaction (e.g. plasma deposition, plasma etching, etc.),

  • plasma-accelerators,

  • laser cooling techniques and atomic optics

  • ion beam applications.

An important characteristic of the master track is the fundamental approach of the themes as well as the research into new applications of this broad field of research.


optional courses is : each student has to choose a well-balanced set of courses to a total of at least 33 ECTS points (about 11 courses);

interdisciplinary project of 8 ECTS points (6 weeks);

external assignment project of 19 ECTS points (12 weeks) usually outside TU/e;

graduation project of 60 ECTS points (1 year).



The three research programmes : is

Equilibrium and Transport in Plasmas (Prof. M.C.M. van de Sanden/Prof. D.C. Schram)

Expanding plasmas and molecule formation

Plasma surface interaction and atomistic simulations

Plasma synthesis of thin films, nanostructures, and devices

Nuclear Fusion (Rijnhuizen)

Elementary processes in Plasmas (Prof. G.M.W. Kroesen)

Non-equilibrium effects

Plasma modelling and Self-organisation in plasmas

Lighting, environmental applications

Biomedical Applications

Coherence and Quantum Technology (Prof. K.A.H. van Leeuwen)

Ultrahigh-gradient electron accelerator concepts

Nanostructure fabrication by laser manipulation

Atom optics/atom interferometry with ultracold atoms

Atom traps: ultracold plasmas and BEC’s


Coherence & Quantum Technology (CQT) is

  • Extremestates of matter: Ultra-cold & ultra-hot, plasmas & gases;

  • Laser Manipulation of atoms, electrons and ions;

  • Atom, electron & ion beams forfemto-nano science & engineering.

  • Ultra-Cold Electron & Ion Beams:

  • Laser cooling & trapping;

  • Femtosecond (10-15 s) laser physics;

  • Ultra-low temperature (0.001 - 10 kelvin) plasmas;

  • Femtosecond electron microscopy;

  • Sub-nanometer ion beam drilling & milling.

Edgar Vredenbregt, Jom Luiten, Peter Mutsaers


  • Theory of Quantum Gases: is

  • Atoms trapped in an optical lattice;

  • Superfluidity of ultra-cold (nano-kelvin) Fermi and Bose gases;

  • Quantum Plasmas & Beams.

Servaas Kokkelmans

  • Plasma Laser Wakefield Acceleration:

  • Tera-watt “light bullet” laser physics;

  • Extreme high-energy-density plasmas;

  • Giga-electron-volt acceleration in a few cm.

Seth Brussaard


Atom beam is

Standinglight wave

Substrate

  • Nano Brush:

  • Manipulation of atomic beams with light;

  • Atom lithography;

  • Deposition of magnetic nano-structures.

Ton van leeuwen


Elementary Processes in Gas Discharges is

Staff:

Prof.dr.ir. G.M.W. Kroesen

Prof.dr. J.J.A.M. van der Mullen

Dr.ir. W.W. Stoffels

Dr.ir. E.M. van Veldhuizen

Prof.dr. U. Ebert

Prof.dr. M. Haverlag

EPG


Elementary Processes in Gas Discharges (EPG) is

  • Light and photons: Efficient lamps and EUV sources

  • Environmental technology: using plasmas for air / water cleaning

  • Biomedical technology: sterilisation; new medical treatments

  • New energy sources: hydrogen technology; dusty plasmas


Plasmas: is

Heaven and earth




Science & Technology of is

Plasma & Materials Processing

http://www.phys.tue.nl/pmp

Prof. dr.ir. Richard van de Sanden

Dr. Richard Engeln

Dr.ir. Erwin Kessels

Dr. Adriana Creatore

(8 postdocs; 15 PhD students; 8-12 BSc/MSc students; 5 technicians)


Research activities
Research activities is

Micro- and nano-engineering of functional materials

Physics and chemistry of

plasma & materials processing

Plasma enhanced CVD

Dry etching

Plasma-assisted ALD

Thin films & devices

Plasma chemistry

Ion/radical densities/fluxes

Energy distribution fcts.

Plasma surface interaction

Advanced plasma and surface diagnostics

Ellipsometry

Nonlinear surface spectroscopy

Novel surface diagnostics

(Laser) based gas phase diagnostics


Research issues plasma materials processing

  • High throughput/large area processing (e.g. solar cells)

Research issues: Plasma-materials processing

Reactive species created in gas phase

rf plasma

More freedom and larger parameter space

  • Precursors, Material properties

  • Plasma-assisted ALD

  • (conformal TiN diffusion barriers, tunnel barriers)

Self-bias/Ion bombardment

  • Etching of high-aspect

  • ratio structures: ion/neutral synergism

Low temperatures

  • Compatibility with

  • substrates/devices

  • Manipulation of ion energy distribution function

  • Novel synergistic

  • effects

  • Organic and polymer devices (encapsulation of OLEDs)


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