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MPW Design Introduction Course - Module 4. Process Description Part II. Tyre pressure sensor (SensoNor). Contents. Process Description, Part I Cross section overview Key process features MPW process step-by-step Process Description, Part II Absolute design limitations

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Mpw design introduction course module 4
MPW Design Introduction Course - Module 4

Process Description

Part II

Tyre pressure sensor(SensoNor)


Contents
Contents

  • Process Description, Part I

  • Cross section overview

  • Key process features

  • MPW process step-by-step

  • Process Description, Part II

  • Absolute design limitations

  • Process control monitors

  • Test data


Absolute design limitations
Absolute design limitations

  • To avoid breakage during fabrication

  • Maximum allowed stress 500 MPa under the following conditions:

    • 2000 g acceleration

    • 1 bar (0.8 bar) pressure difference


Process control monitors
Process control monitors

  • Test dies

    • electrical parameters

    • mechanical dimensions


Process control monitors1
Process control monitors

  • Product wafers

    • Visual inspection

    • Oxide thickness

    • Diaphragm thickness

  • Test wafers

    • Sheet resistivity

    • Film thickness


Test data
Test data

  • Automated test data collection

  • Measurement database

  • Process monitoring / SPC




Chapter 4 mpw process description
Chapter 4:MPW Process Description

  • End of this chapter

    • Questions or comments?


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