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A 0.13um CMOS Rad-hard proven technology with associated mixed mode circuit design approaches for space applications. Laurent Dugoujon (1), Constantin Papadas (2) and Bill Sinnis (2) 1) ST Microelectronics, 12 rue Jules Horowitz, B.P. 217, 38019 Grenoble Cedex, France

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slide1

A 0.13um CMOS Rad-hard proven technology with associated mixed mode circuit design approaches for space applications

Laurent Dugoujon (1), Constantin Papadas (2) and Bill Sinnis (2)

1) ST Microelectronics, 12 rue Jules Horowitz, B.P. 217, 38019 Grenoble Cedex, France

2) Integrated Systems Development S.A., Atrina Center, Building B, 32 Kifisias Avenue, 15125 Marousi, Greece.

introduction
INTRODUCTION
  • New Telecommunications Satellites must offer:
  • High data throughput
  • Uninterrupted Service
  • High Reliability
  • Competitive costs

- The usage of Deep-Sub-Micron technology is now mandatory to keep-up with US manufacturers -

key functions
KEY FUNCTIONS
  • Some functions are « key » to succes:
  • Broadband Analog-Digital Converters: ADC & DAC
  • High Speed Serial Links
  • Digital Processing ASICs

- For these key components, only modern technology nodes (<=0.25um) can fulfill the specifications -

slide6

0.13µm Technology Platforms

Digital/Analog/RF convergence

HCMOS9

Core Process

4 or 6 Cu Dual Damascene Metal levels

0.41µm pitch metallization, Low k dielectric

HCMOS9DRAM

0. 39/ 0.53µm²

HCMOS9i

HCMOS9 A

HCMOS9 SOI

BICMOS9

HCMOS9 SiGe

hcmos9 device list
HCMOS9 : Device list

CAPACITORS

  • 2 fF/µm² MIM capacitor (option)
  • N+Poly/NWell capacitor (GO2:50A)
  • P+Poly/PWell capacitor (GO2:50A)
  • Interdigited Metal fringe capacitor (MOM)
  • Intermetal capacitor (MEM)

MOSFETs

  • 1.2V HS 0.13µm CMOS (GO1 : 20A)
  • 1.2V LL 0.13µm CMOS (GO1 : 20A)
  • 2.5V CMOS (GO2 : 50A)
  • 2.5V HS CMOS (GO2 : 50A) (option)
  • DRIFT N & P MOS transistors (GO2:50A)
  • NMOS SRAM (option)

JUNCTION DIODES

  • N+/Pwell
  • P+ /Nwell

RESISTORS

  • Silicided N+ Poly; 10 Ohm/sq
  • Unsilicided p+ Active; 135 Ohm/sq
  • Unsilicided P+ Poly; 320 Ohm/sq
  • Hipo; 1KOhm/sq (option)
  • Unsilicided N+ Poly; 110 Ohm/sq
slide8

ST 130 & 90nm SRAMs are invulnerable to thermals

7Li Recoil

Low Energy Neutron

104

0.84 MeV

103

10B Fission

 - particle

102

1.47 MeV

101

Neutron Cross-section (barns)

100

Oxygen

Boron-11

10-1

BORON 10

Tungsten

Nitrogen

Titanium

Aluminum

Copper

Phosphorus

Arsenic

Silicon

10-2

10-3

  • Thermal neutrons highly interact with Boron10
  • Highest concentration of Bo10 in today’s IC :

borophosphosilicate glass (BPSG) film : not used in ST technologies

  • Test on 130nm ST SRAMs at ILB, Paris : no SEU with a fluence >1011n/cm2
  • Test on a 90nm SRAMs at TRIUMF, Vancouver : no SEU variations with & without Cadnium shielding
tid characterizations for 130nm mosfets r srams
TID characterizations for 130nm MOSFETs & (r)SRAMs
  • Linear transistors 130nm (thin oxide) @ 30 MradSi - Tests performed by CERN
    • Threshold voltage shift < 10 mV : negligible
    • Subthreshold swing variations : negligible
    • Transconductance degradation of less than 10%
  • Linear transistors 130nm (thick oxide) @ 30 MradSi - Tests performed by CERN
    • Threshold voltage shift < 35 mV : negligible
    • Transconductance degradation of less than 10%
  • Two 130nm 1Mb SRAMs, standard and rSRAM tested at BNL @ 1 MradSi :
    • No bit error detected for each memory cut at initial and after each exposure step (0, 100, 500 and 1000Krads(Si))
    • Full functionality verified for the 2 cuts after being exposed to 1Mrad(Si).

These experimental results confirm the strong robustness of ST 130nm

MOSFETS, SRAM and robust SRAMs

CERN test report : “specifications should be met in terms of radiation requirements WITHOUT using enclosed transistors (with obvious benefits)”

slide10

Responses to HI of 130nm regular & robust rSRAMs

Experiments performed at the BNL, NY, 01/2004

Std SRAM

rSRAM ref.

The rSRAM has both a lower LETth (x10) & X-section at sat. (/3) than the regular SRAM

No SEL recorded up to 80 MeV/cm2.mg for all tested SRAMs

rhbd library level1
RHBD: Library Level
  • Or …
  • Trench capacitors
  • Drain degeneration by drain contact distance
  • Silicide protect
  • Salicide protect
rhbd library level2
RHBD: Library Level

Redundant Latch

Layout

Standard (6 xtors)

Redundant (14 xtors)

rhbd library level3
RHBD: Library Level

Triple Voting Scheme

rhbd architecture level

Error Code

Correction

(eg Hamming)

RHBD: Architecture Level

ECC

slide18

rSRAM validation Testchip in 130 nm

  • Content :
    • SRAM Standard 1Mb
      • memcell 2.5 µm2
    • SRAM Standard 1Mb
      • memcell 2.5 µm2 with Triple Well
    • rSRAM 1Mb
      • robust memcell 2.5 µm2
    • rSRAM 1Mb
      • robust memcell 2.5 µm2 - ver. 2

(lower capacitor value)

    • 50x164Kb
      • robust memcell 2.5 µm2
  • Package :
    • PBGA 27x27 276+16

1Mb

SRAM

1Mb

SRAM

1Mb

rSRAM

1Mb

rSRAM

scribes

  • PLL, BIST, Laser Fuses

Chip micrograph

slide19

Relative perf between a standard, robust and ECC SRAM

130nm Single-Port SRAM - 32kx32 HCMOS9GP-LL, typical corner, 1V2, room temp.

90nm Single-Port SRAM - 8kx32 CMOS90-GP, typical corner, 1V, room temp.

Note1 : pipeline architecture, Note2 : penalty induced by the additional parity bits (= +7 bits for a 32 bit-word ) and combinatonial logic (XOR stage)

rSRAM offers lower die cost than ECC with a similar robustness

slide20

Alpha & neutron responses of the 130nm rSRAM

Experiments performed at Los Alamos and Crolles, 2003

Alpha accelerated results @ 1.2V

Neutron accelerated results @ 1.2V

ST rSRAM provides a robustness enhancement by ×250 :

SER < 10 FIT/Mb @ 1.2 V + full immunity @ 1.32 V

robust designs pll and sense amplifier

LOGO

TAP0

Sense

amplifier

PLL

UWBTBA

Robust Designs: PLL and Sense Amplifier

PLL

Technology: 0.13um

Locking Frequency: 620MHz

CtoC Jitter: 17ps

Power Consumption: 340mW

Sense Amplifier

Technology: 0.13um

Bandwidth: 4GHz

Gain: 12db

Power Consumption: 15mW

robust designs 64x1bit adc
Robust Designs: 64x1bit ADC

64x1bit-ADC

Technology: 0.13um

Sampling Frequency: 3GHz

Power Consumption: 500mW

robust designs 10bit dac
Robust Designs: 10bit DAC

10bit-DAC

Technology: 0.13um

Topology: Current Steering

Sampling Frequency: 15MHz

Signal bandwidth~2.5MHz

ENOB: 8.73bits

Imax=1.4mA

Noise: +/- 2LSB

robust designs 10bit adc
Robust Designs: 10bit ADC

10bit-ADC

Technology: 0.13um

Topology: Interleaved SAR

Sampling Frequency: 1.3GHz

Consumption: 400mW

ENOB: in test

Noise: in test

conclusion
CONCLUSION
  • It is the CONJUNCTION of 3 main levels of efforts which can maximize the Radiations performances:
  • Intrinsic good choices at Si process level (materials,...)
  • usage of validated mitigation techniques (libraries, options,...)
  • design for Rad-hard (architecture, registers,...)
  • We are able to manage all these levels with additional know-how from space industry trough contractual projects
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